Automatic guided vehicle with multi-stage loading structure
An automatic guided vehicle, loader technology, applied in loading/unloading, transportation and packaging, semiconductor/solid-state device manufacturing, etc., which can solve problems such as reducing production line spacing
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[0020] Examples of the inventive concept will now be described in detail below with reference to the accompanying drawings. Throughout the drawings, the same reference numbers may refer to the same parts.
[0021] figure 1 A layout of equipment 8 (hereinafter referred to as "fab") and a plurality of automated guided vehicles 1 used in the manufacture of certain items (eg, semiconductor devices) in accordance with the present inventive concept is shown.
[0022] Each manufacturing facility 8 may be configured to transport, store, assemble, inspect and / or test items ( figure 2 91 in ).
[0023] For any of these purposes, each manufacturing facility 8 may include at least one port 81 at which items 91 are loaded into the facility 8, from which items 91 are unloaded, or It is temporarily held in facility 8 at port 81 . However, this dedicated port 81 is optional. The automated guided vehicle 1 may be used to load or unload items 91 onto or from the manufacturing facility 8, ...
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