Microelectromechanical sensor

Abstract

The invention relates to a microelectromechanical sensor comprising an electrode plate, a vibrating diaphragm structure, a supporting structure and a pressure releasing film layer. The electrode plate has a conductive portion. The vibrating diaphragm structure is spaced apart on one side of the electrode plate and has a sensing film layer. The supporting structure is disposed between the vibrating diaphragm structure and the electrode plate and surrounds an electrical coupling region and a gas flow region. The supporting structure includes an inner wall and an outer wall. The inner wall surrounds the outer edge of the gas flow zone, and the outer wall surrounds the outer edge of the electrical coupling zone. The pressure releasing film layer blocks the gas flow zone.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a micro-electromechanical sensor. Background technique [0002] The vibrating membrane of the MEMS sensor may be damaged by the strong wind in the environment or the instantaneous high pressure generated by the air squeezed by the door panel. Nowadays, in order to avoid the excessive pressure difference inside and outside the MEMS sensor, multiple pressure relief holes are added to the vibrating membrane of the sensor. When the inside and outside of the sensor are subjected to large air pressure changes, multiple pressure relief holes can Adjust the pressure balance inside and outside the sensor. [0003] However, considering that adding a pressure relief hole may affect the elasticity of the diaphragm and the sensing performance of the sensor, only a small amount of pressure relief holes with a small area can be added without affecting the sensing effect, which can adjust the effect of i...

AI Technical Summary

Problems solved by technology

[0003] However, considering that adding a pressure relief hole may affect the elasticity of the diaphragm and the sensing performance of the sensor, only a small amount of pressure relief holes with a small area can be added without affecting the sensing effect, which can adjust the effect of instantaneous high pressure Relatively insufficient

Therefore, the existing technical means using pressure relief holes still cannot avoid the possibility of damage to the diaphragm caused by pressure differences

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