Optical detection device and optical detection method

Abstract

Embodiments of the invention disclose an optical detection device and an optical detection method. The optical detection device comprises a light source, a chromatic aberration objective lens, a multi-wavelength separation unit and at least two detectors, wherein the light source is used for emitting detection light beams; the chromatic aberration objective lens is used for collecting light beamsreflected and / or scattered by at least two surfaces of a to-be-detected object and emitting signal light beams; at least two light beams with different central wavelengths in the detection light beamsare respectively and correspondingly focused on the at least two surfaces; the multi-wavelength separation unit is used for separating at least two sub-signal light beams with different central wavelengths from the signal light beams; and the at least two detectors are used for respectively receiving the at least two sub-signal light beams with different central wavelengths and respectively obtaining image information of the at least two surfaces of the to-be-detected object according to the at least two sub-signal light beams with different central wavelengths. The optical detection device and the optical detection method are capable of solving the problem that the to-be-detected objects with fluctuant surfaces need multiple times of image acquisition, and shortening the optical detection time and improving the detection efficiency.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of optical detection, and in particular, to an optical detection device and an optical detection method. Background technique [0002] With the deepening and popularization of industrial automation and intelligence, the use of automatic optical inspection equipment (Auto Optical Inspection, AOI) to replace traditional manual visual inspection has become a technological development trend. AOI equipment is widely used in automobiles, medicine, transportation, semiconductors and other fields due to its fast and accurate defect identification and positioning capabilities. [0003] At present, existing AOI equipment usually includes an optical imaging system, an object stage, a material transfer system, and the like. The optical imaging system includes an illumination unit, an imaging objective lens, and a detector. In order to obtain a clear image of the surface of the object to be tested...

AI Technical Summary

Problems solved by technology

Existing AOI equipment can only acquire a clear image of one height surface at a time. To realize the detection of different heights of the surface to be tested, multiple image acquisitions are required, which takes a long time

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