Flow control equipment with controllable gas temperature and humidity

Abstract

The invention relates to flow control equipment with controllable gas temperature and humidity. The flow control equipment comprises a control equipment body, a control module, a humidifying adjustingchannel, a drying adjusting channel, a temperature adjusting device, a humidifier, a dryer and a temperature and humidity sensor; the temperature and humidity sensor is arranged at an output channelof the control equipment body, the humidifying adjusting channel communicates with the humidifier through the temperature adjusting device, the drying adjusting channel communicates with the dryer through the temperature adjusting device, the humidifying adjusting channel penetrates through the humidifier to communicate with the output channel of the control equipment body, the drying adjusting channel penetrates through the dryer to communicate with the output channel of the control equipment body, the temperature of the gas can be adjusted through the temperature adjusting device, and the flow of the gas flowing through the humidifying adjusting channel and the drying adjusting channel is adjusted respectively, so that target gases with different humidity can be matched; and meanwhile, the temperature and the humidity of the output gas can be controlled.

Description

technical field [0001] The invention relates to the technical field of gas control, in particular to a flow control device with controllable temperature and humidity of gas. Background technique [0002] Gas mass flow controller (Mass Flow Controller, MFC) is a commonly used component in the field of microelectronics and chemical industry. The gas mass flow controller is mainly used for precise measurement and control of the mass flow of gas. It has important applications in scientific research and production in various fields such as material development, chemical industry, petroleum industry, medicine, environmental protection and vacuum. The traditional flow control method only uses the combination of gas mass flow sensor and regulating valve, and uses the control unit to perform data acquisition and control proportional integral differential adjustment, but most of them can only control the flow rate and type of gas. When the user has requirements for the temperature an...

AI Technical Summary

Problems solved by technology

This method of humidity control is not only uncontrollable, but also the gas carrying water vapor is in a saturated state, which is above 100% RH, and usually reaches the dew point to cause condensation, so that the output gas humidity cannot be truly controlled.

Moreover, the adjustment of the output gas humidity cannot be realized, and the gas humidity can only be theoretically calculated or the heating temperature can be reduced according to the outlet humidity

[0004] Whether it is the control of gas temperature or the control of gas humidity, there are large errors in its adjustment. Therefore, a flow control device with controllable gas temperature and humidity is urgently needed to meet people's requirements for gas temperature and humidity.

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