Flow control equipment with controllable gas temperature and humidity

A technology of flow control and gas temperature, applied in non-electric variable control, control/regulation system, and simultaneous control of multiple variables. question

Pending Publication Date: 2019-10-08
北京晓韬科技有限公司
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  • Abstract
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AI Technical Summary

Problems solved by technology

This method of humidity control is not only uncontrollable, but also the gas carrying water vapor is in a saturated state, which is above 100% RH, and usually reaches the dew point to cause condensation, so that the output gas humidity cannot be truly controlled.
Moreover, the adjustment of the output gas humidity cannot be realized, and the gas humidity can only be theoretica

Method used

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  • Flow control equipment with controllable gas temperature and humidity
  • Flow control equipment with controllable gas temperature and humidity

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Embodiment Construction

[0050] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other implementations obtained by persons of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.

[0051] figure 1 It is a structural schematic diagram of the gas temperature and humidity controllable flow control device provided by the embodiment of the present invention.

[0052] Such as figure 1 as shown, figure 1 The arrows shown in the figure are the flow direction of the gas, and the connection lines in the figure are the electrical connections between the components of each module. A flow control device with controllable gas temperature and humidit...

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Abstract

The invention relates to flow control equipment with controllable gas temperature and humidity. The flow control equipment comprises a control equipment body, a control module, a humidifying adjustingchannel, a drying adjusting channel, a temperature adjusting device, a humidifier, a dryer and a temperature and humidity sensor; the temperature and humidity sensor is arranged at an output channelof the control equipment body, the humidifying adjusting channel communicates with the humidifier through the temperature adjusting device, the drying adjusting channel communicates with the dryer through the temperature adjusting device, the humidifying adjusting channel penetrates through the humidifier to communicate with the output channel of the control equipment body, the drying adjusting channel penetrates through the dryer to communicate with the output channel of the control equipment body, the temperature of the gas can be adjusted through the temperature adjusting device, and the flow of the gas flowing through the humidifying adjusting channel and the drying adjusting channel is adjusted respectively, so that target gases with different humidity can be matched; and meanwhile, the temperature and the humidity of the output gas can be controlled.

Description

technical field [0001] The invention relates to the technical field of gas control, in particular to a flow control device with controllable temperature and humidity of gas. Background technique [0002] Gas mass flow controller (Mass Flow Controller, MFC) is a commonly used component in the field of microelectronics and chemical industry. The gas mass flow controller is mainly used for precise measurement and control of the mass flow of gas. It has important applications in scientific research and production in various fields such as material development, chemical industry, petroleum industry, medicine, environmental protection and vacuum. The traditional flow control method only uses the combination of gas mass flow sensor and regulating valve, and uses the control unit to perform data acquisition and control proportional integral differential adjustment, but most of them can only control the flow rate and type of gas. When the user has requirements for the temperature an...

Claims

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Application Information

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IPC IPC(8): G05D27/02
CPCG05D27/02
Inventor 马弢牛晓杨健张福林
Owner 北京晓韬科技有限公司
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