Vertical vacuum glass coating line
A vacuum glass and coating line technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of low coating production efficiency, improve coating production efficiency, reduce and shorten coating cycle time Effect of Coating Takt Time
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[0029] Such as figure 1 As shown, the vertical vacuum glass coating line of the present invention includes the loading and unloading area A of the glass, the shelf chamber B entering and exiting, the isolation valve C and the coating chamber D, and the first moving device. Each part and the relationship between them are carried out below Detailed description:
[0030] Such as figure 1 with figure 2 As shown, the inlet and outlet of the rack chamber B is provided with a door valve E, and the door valve E includes: a sealing door 1, a connecting plate 2, a rotating shaft 3, a gear 4, a rack 5, a linear drive 6, and one end of the sealing door 1 is connected to the The entrance and exit of the shelf chamber B is hinged, and when the airtight door 1 rotates around the hinge of the entrance and exit shelf chamber B, the input port of the entrance and exit of the shelf chamber B is opened or closed. One end of the connecting plate 2 is fixedly connected with the airtight door 1, ...
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