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Mask plate storage device

A technology for storage devices and mask plates, which is applied to collaborative devices, instruments, computer components, etc., and can solve problems such as high manual operation risks

Pending Publication Date: 2019-10-18
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention provides a mask storage device to alleviate the technical problem of high manual operation risk in the existing mask storage device

Method used

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  • Mask plate storage device
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Embodiment Construction

[0029] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [top], [bottom], [front], [back], [left], [right], [inside], [outside], [side], etc., are only for reference The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention. In the figures, structurally similar elements are denoted by the same reference numerals.

[0030] The invention provides a mask storage device and a mask storage management method to alleviate the technical problem of high manual operation risk in the existing mask storage device.

[0031] Such as figure 1 As shown in , it is a schematic diagram of the first structure of the mask storage device provided by the embodiment of the present invention. The mask ...

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Abstract

The invention provides a mask plate storage device, which comprises a storage cavity, a scanning assembly and a processor, wherein the storage cavity comprises a plurality of storage cavity positionsfor storing mask plates; the scanning assembly is used for scanning the storage cavity at a preset period and identifying the condition of storing the mask plate in each storage cavity position; and the processor is used for comparing the scanning result with a locally stored mask plate in-place list and prompting a comparison result. By setting the scanning assembly in the mask plate storage device, the condition of the mask plate in the storage cavity can be scanned in a preset period, and the processor compares a scanning result with a system storage result and then gives a corresponding prompt, so that equipment and experiment fault risks caused by the fact that an operator does not detect the state of the mask plate in the storage cavity in time and does not handle the state of the mask plate in time are reduced.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask storage device. Background technique [0002] Evaporation or exposure equipment often requires multiple masks to exist in the temporary storage compartment at the same time for standby, and replace with corresponding masks when necessary. There is a mask position scanning device in the temporary storage cabin to indicate whether there is a mask at the corresponding position, but the scanning device requires the operator to issue a scanning detection command to start the detection. At the same time, after the mask board is taken away or put in without the normal transmission process of the system, it needs to be manually deleted or added to identify the existence of the mask board in the equipment system. The number of manual operations will gradually increase, and the risk of misoperation will gradually increase, bringing higher and higher risks to equipment and experime...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06K17/00
CPCG06K17/0022
Inventor 李祥龙
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD