Pressure sensor having overpressure protection with reduced output error

Abstract

An apparatus includes a sensor body (206), a sensor (204) configured to measure differential pressure, and first and second pressure inputs in or on the sensor body. The pressure inputs are configuredto provide multiple input pressures to the sensor. Each pressure input includes a barrier diaphragm (208, 210) configured to move in response to pressure and an overload diaphragm (216, 218) configured to limit movement of the barrier diaphragm. The overload diaphragm is also configured to exert a preload force against the sensor body. The overload diaphragm of each pressure input may include multiple convolutions. Bases (502) of the convolutions may be configured to provide the preload force, and tops of the convolutions may be separated from the sensor body by gaps (504). Tops (602) of theconvolutions that are non-adjacent may be configured to provide the preload force, and tops of the convolutions between the non-adjacent convolutions may be separated from the sensor body by gaps (604).

Description

[0001] Cross-references and priority claims to related applications [0002] This patent application claims priority under 35 U.S.C. § 119(e) to the following U.S. Provisional Patent Application: [0003] - U.S. Provisional Patent Application 62 / 469,716 filed March 10, 2017; [0004] - U.S. Provisional Patent Application 62 / 469,954, filed March 10, 2017; [0005] - U.S. Provisional Patent Application 62 / 470,080, filed March 10, 2017; and [0006] - U.S. Provisional Patent Application 62 / 470,089 filed March 10, 2017. [0007] All of these provisional applications are hereby incorporated by reference in their entirety. technical field [0008] This disclosure generally relates to pressure sensors. More specifically, the present disclosure relates to pressure sensors with overvoltage protection with reduced output errors. Background technique [0009] Differential pressure transmitters typically operate by providing two pressure values ​​to the sensor. The sensor converts...

AI Technical Summary

Problems solved by technology

[0010] While various overpressure protection mechanisms exist, some of these mechanisms result in small errors in the differential pressure measurement output from the pressure sensor

Others of these mechanisms are expensive to implement due to expensive machining operations

Furthermore, some of these mechanisms are unreliable under certain operating conditions and still allow sensor damage to occur

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