Piezoelectric member, ultrasonic oscillation element, ultrasonic probe, ultrasound diagnostic system, and method for producing piezoelectric member
A piezoelectric element and piezoelectric component technology, which is used in ultrasonic/sonic/infrasonic diagnosis, piezoelectric/electrostrictive device manufacturing/assembly, ultrasonic/sonic/infrasonic equipment control, etc. Problems such as reduced adhesion
Active Publication Date: 2019-10-25
KONICA MINOLTA INC
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
[0003]
However, when the thiol compound film is provided between the piezoelectric element and the metal electrode, the adhesion of the metal electrode to the piezoelectric element tends to decrease.
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[0025] Hereinafter, a piezoelectric component or an ultrasonic oscillator element and a method of manufacturing the same will be described as one embodiment of the present invention with reference to the drawings.
[0026] figure 1 is an enlarged cross-sectional view of the piezoelectric component of the embodiment, Figure 2A-2C It means that a combination of multiple figure 1 A plan view, a cross-sectional view, and the like of an ultrasonic oscillation element, which is an aggregate of piezoelectric components shown.
[0027] Such as figure 1 As shown, the monolithic piezoelectric component 102 includes: a three-dimensional structure group 20 formed by periodically arranging a plurality of piezoelectric elements 21; a plurality of filling parts 31 filling gaps in the three-dimensional structure group 20; The first and second electrodes 41 , 42 are arranged up and down in a group 20 . Here, the three-dimensional structure group 20 is an array composed of a plurality of p...
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Abstract
Provided is a piezoelectric member which is improved in terms of adhesion of a metal electrode to a piezoelectric element. A piezoelectric member 102 is provided with: a piezoelectric element 21; anda pair of electrodes 41, 42 which are respectively formed on a pair of opposite surfaces 21b, 21c of the piezoelectric element 21. The electrodes 41, 42 have: base films 41a which are formed on the opposite surfaces 21b, 21c of the piezoelectric element 21, while having a thiol group; metal bonding films 41b which are formed on the base films 41a; and electrode films 41c which are formed on the metal bonding films 41b for the purpose of applying a voltage to the piezoelectric element 21. The metal bonding films 41b are formed from a material that is different from the material of the electrodefilms 41c, while having a thickness of from 1 nm to 10 nm (inclusive).
Description
technical field [0001] The present invention relates to a piezoelectric component that can be used in ultrasonic measuring devices and other various ultrasonic application equipment, an ultrasonic oscillator including the piezoelectric component, an ultrasonic probe, an ultrasonic diagnostic apparatus, and a method of manufacturing the piezoelectric component. Background technique [0002] As a piezoelectric element, a piezoelectric element having a film containing a compound having a thiol group on the piezoelectric element and a metal electrode formed of Au, Ni, or Pt formed on the film of the thiol compound is known (refer to Patent No. Literature 1, 2). The thiol compound film is used for the purpose of improving the connection strength between the piezoelectric element and the electrodes. In addition, a metal electrode made of Au or the like has a small film stress and is used for the purpose of suppressing the hindrance of the displacement of the piezoelectric element...
Claims
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IPC IPC(8): H01L41/047A61B8/00H01L41/113H01L41/29H04R17/00H04R31/00H10N30/00H10N30/87H10N30/06H10N30/08H10N30/20H10N30/30H10N30/853H10N30/857
CPCH04R17/00H04R31/00A61B8/4444A61B8/4483A61B8/54H10N30/87H10N30/852H10N30/8548H10N30/06H10N30/092H10N30/877A61B8/4494H10N30/08H10N30/857
Inventor 清水直纪多田一成
Owner KONICA MINOLTA INC