A High Stability Temperature Sensor Sensitive Element
A technology of temperature sensor and sensitive element, used in thermometers, thermometers and instruments using electrical/magnetic elements directly sensitive to heat, etc., can solve the problem of large difference in expansion coefficient between platinum film and ceramic substrate, and unsatisfactory component stability , unstable resistance and other problems, to reduce the transportation process, improve stability, and improve reliability.
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Embodiment 1
[0034] A high stability temperature sensor sensitive element, as attached figure 1 As shown, it includes a ceramic substrate 6, a thick-film platinum layer 1, a thin-film platinum layer 2 and an insulating encapsulation layer 3. The thick-film platinum layer 1 is arranged on the ceramic substrate 6 by printing and sintering, and the thick-film platinum layer 1 has a network structure. The skeleton is honeycomb-shaped. The thin-film platinum layer 2 is filled in the skeleton by magnetron sputtering, and the thick-film platinum layer 1 and the thin-film platinum layer 2 are etched to form a temperature-sensing circuit. In this embodiment, the temperature-sensing circuit is preferably platinum commonly used in the prior art. Thermal resistance temperature sensing circuit.
[0035] The insulating encapsulation layer 3 wraps the surface of the thick-film platinum layer 1 and the thin-film platinum layer 2 (that is, the surface of the temperature-sensing circuit), the insulating en...
Embodiment 2
[0041] The difference between this embodiment and Embodiment 1 is that: figure 2 As shown, the temperature sensing circuit includes two ladder circuits, a Link circuit and two wide resistance conductors.
Embodiment 3
[0043] The difference between this embodiment and Embodiment 2 is that a method for manufacturing a high-stability temperature sensor sensitive element is also provided, including the following steps:
[0044] Platinum powder production steps: (1) dissolving step: using aqua regia to dissolve the platinum material to obtain a chloroplatinic acid solution.
[0045] (2) Purification step: Purify the chloroplatinic acid solution by purification technology to obtain ultra-high-purity sodium chloroplatinate. The specific purification steps are as follows: add analytically pure sodium chloride to the chloroplatinic acid solution to obtain a sodium chloroplatinate solution, adjust the pH value of the sodium chloroplatinate solution to 6 with a high-purity sodium hydroxide solution, and let it stand After 30 minutes, the solution was evaporated to dryness, and high-purity sodium chloroplatinate (purity above 99.999%) was obtained through hydrolysis and filtration. Through multiple pu...
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