Micro-lens array grinding device and micro-lens array grinding method
A microlens array and grinding device technology, applied in the field of grinding, can solve the problems of long processing time, low processing efficiency, and inability to guarantee the consistency of microlenses, and achieve the effect of ensuring processing accuracy and high processing efficiency
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[0031] The invention provides a microlens array grinding device, such as figure 1 As shown, it includes a base 1, a translation device 2, a lifting device 3, a vibration generating device, a support device, a grinding head 6, a power unit 11, and an elastic workbench 4 for supporting a workpiece 5 to be processed. The translation device 2 can slide The lifting device 3 is slidably installed on the translation device 2, the elastic body workbench 4 is fixedly installed on the lifting device 3, the lifting direction of the lifting device 3, the sliding direction of the translation device 2 and the lifting device The sliding directions of 3 are perpendicular to each other, the supporting device is fixedly connected to the base 1, the grinding head 6 is fixed on the supporting device, and the grinding end surface 601 of the grinding head 6 is opposite to the workpiece 5 to be processed, and the power unit 11 is connected to the grinding head 6 To drive the grinding head 6 to rotat...
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