Novel arc swinging plane grinding device

Abstract

The invention discloses a novel arc swinging plane grinding device. The novel arc swinging plane grinding device comprises a motor bracket, a motor I, a rigid coupling, a lower arc-shaped guide rail,a cylindrical gear I, a cylindrical gear II, a bullseye eye wheel, a shaft I, a gear fixing frame, a lower swing arm, an upper swing arm, an upper arc-shaped guide rail, a fixed vertical plate, a motor plate, a bending shaft, a bevel gear II, a motor II, a plum coupler, a shaft II, a cylindrical gear III, a cylindrical gear IV, a shaft III, a shaft IV, a bevel gear I, a universal joint, a fixed cross plate, a shaft V, a chuck, an inserting rod and a workpiece disc. The workpiece disc is driven by the mechanical mechanism and one motor to form an irrational number of autorotation, and at the same time, the other motor drives the workpiece disc to do swing movement with variable swing angle, so that the workpiece disc can realize the rotation and swing in the grinding process, so that a grinding track line is not closed, and the distribution range of the track line in the grinding disc is enlarged. According to the novel arc swinging plane grinding device, and the precision and the efficiency of the plane grinding are improved.

Description

technical field [0001] The invention relates to a plane grinding mechanism, specifically a new type of grinding equipment composed of two motors, four cylindrical gears, two bevel gears, two sets of arc-shaped guide rails, etc., belonging to the technical field of plane grinding . Background technique [0002] The kinematics of plane grinding is an important theoretical basis for high-precision shape control. With the increase of crystal substrate size, the control of grinding uniformity becomes more and more difficult, and the uniformity of grinding track has become a research hotspot. The kinematic principle between the grinding disc and the workpiece is one of the main factors restricting the precision of plane grinding, that is, the plane formation mechanism of the grinding surface, mainly including the design of the driving mode, processing parameters and flatness dressing method of the grinding disc . [0003] In the process of surface grinding, on the one hand, it ...

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the shortcomings of low precision and low efficiency of the existing plane grinding mechanism, the present invention provides a new type of circular arc swing plane grinding device which improves the precision and efficiency of plane grinding

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