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A linear motion and plane grinding technology, which is applied in the direction of grinding device, grinding drive device, grinding/polishing safety device, etc., can solve the problems of low efficiency and low grinding precision, and achieve stable transmission, high grinding precision and efficiency, The effect of low production cost
Pending Publication Date: 2019-11-26
ZHEJIANG UNIV OF TECH
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[0006] In order to overcome the shortcomings of low grinding precision and low efficiency of the existing plane grinding mechanism, the present invention provides a new linear motion plane grinding device with improved grinding precision and efficiency
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[0024] The present invention will be further described below in conjunction with the accompanying drawings.
[0025] refer to Figure 1 ~ Figure 4 , a new type of linear motion surface grinding device, including plunger, universal joint, bevel gear II, screw slide table, slide table back plate, bevel gear I, linear guide rail, shaft II, slider, motor plate, cylindrical gear Ⅱ, cylindrical gear Ⅰ, motor Ⅱ, motor Ⅰ, bent shaft, fixed vertical plate, shaft Ⅳ, fixed horizontal plate, chuck, workpiece disc, grinding disc, coupling Ⅰ, shaft Ⅰ, bullseye wheel, shaft III and Coupling II.
[0026] The output shaft of the motor I14 is fixedly installed on the screw shaft of the screw slide 4 through the coupling II26, and the motor seat of the motor I4 is fixed and installed on the corresponding position of the screw slide 4 by bolts; the slider 9. The coaxial center is installed on the lead screw of the lead screw slide 4, and is fixedly connected with a section of the motor plate 10...
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Abstract
A novel linear motion plane grinding device comprises an inserting rod, a cardan joint, a bevel gear II, a lead screw sliding table, a sliding table back plate, a bevel gear I, a linear guide rail, ashaft II, a sliding block, a motor plate, a cylinder gear II, a cylinder gear I, a motor II, a motor I, a bend shaft, a fixing vertical plate, a shaft IV, a fixing transverse plate, a chuck, a workpiece disc, a grinding disc, a coupler I, a shaft I, a bull eye wheel, a shaft III and a coupler II. Through a mechanical structure, one motor is used for driving the workpiece disc to achieve irrationalnumber self-rotation, meanwhile, the other motor drives the workpiece disc to do the variable range linear motion, the workpiece disc achieves the self-rotation movement and the linear movement in the grinding process, the grinding track line is not closed, and the distribution range of the track line on the grinding disc is enlarged. By means of the novel linear motion plane grinding device, thegrinding precision and efficiency are improved.
Description
technical field [0001] The invention relates to a plane grinding mechanism, specifically a new type of grinding equipment composed of two motors, two cylindrical gears, two bevel gears, a linear guide rail, and a screw slide table, which belongs to the plane grinding process technology field. Background technique [0002] The kinematics of plane grinding is an important theoretical basis for high-precision shape control. With the increase of crystal substrate size, the control of grinding uniformity becomes more and more difficult, and the uniformity of grinding track has become a research hotspot. The kinematic principle between the grinding disc and the workpiece is one of the main factors restricting the precision of plane grinding, that is, the plane formation mechanism of the grinding surface, mainly including the design of the driving mode, processing parameters and flatness dressing method of the grinding disc . [0003] In the process of surface grinding, on the o...
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