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High-dynamic force balance control method of MEMS (micro-electro-mechanical system) resonant gyroscope

A control method and gyroscope technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve problems such as affecting control accuracy and effect, low sensitivity, weak anti-interference ability, etc. range and measurement bandwidth, improve linearity and anti-interference ability, and ensure the effect of measurement accuracy and stability

Active Publication Date: 2019-11-12
OCEAN UNIV OF CHINA
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  • Application Information

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Problems solved by technology

[0007] However, the control algorithm of the digital closed-loop control device adopts PID control, which has the problem of excessive system overshoot due to integration, which affects the control accuracy and effect, and the bandwidth is small, the sensitivity is low, and the anti-interference ability is weak

Method used

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  • High-dynamic force balance control method of MEMS (micro-electro-mechanical system) resonant gyroscope

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Embodiment Construction

[0065] The present invention will be further described in detail below in conjunction with the drawings and specific implementations:

[0066] Combine figure 1 As shown, the embodiment of the present invention describes a digital control device for a MEMS resonant gyroscope. The digital control device includes four parts: a data conversion module, a high-speed digital module, a real-time control module, and a communication module.

[0067] Among them, the data conversion module includes digital-to-analog conversion and analog-to-digital conversion, and has the following two functions:

[0068] ①It converts the analog signal output by the gyro meter head into a digital signal and sends it to the main control module for data processing;

[0069] ②It converts digital signals into analog signals for driving the gyro instrument head.

[0070] The high-speed digital module adopts high-speed FPGA for platform development, and takes advantage of the advantages of flexible high-speed FPGA confi...

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Abstract

The invention discloses a high-dynamic force balance control method of an MEMS (micro-electro-mechanical system) resonant gyroscope. The method approximately comprises steps as follows: firstly, an augmentation form of a gyroscope resonant model is obtained and serves as a calculation model of an MPC (model predictive controller); then, the optimal balance force sequence is calculated in real timeat each sampling moment under the condition that balance force output constraint of the controller is met , and a first value of a vector of the sequence is taken as a controlled variable of the nextmoment. Such cycle calculation is performed, and finally, one optimal balance force sequence can be obtained, so that output of the gyroscope resonant model approaches a resonant output given value,coriolis force is counteracted, and force balance is realized. Accurate control of amplitude and frequency of the MEMS resonant gyroscope can be realized, accurate modal drive is provided for the gyroscope, and measurement accuracy and stability of the gyroscope are guaranteed. Meanwhile, the dynamic range and the measurement bandwidth of the gyroscope are enlarged, linearity and anti-jamming capability of scale factors are improved, and the sensitivity and the overall performance of the MEMS resonant gyroscope are improved.

Description

Technical field [0001] The invention relates to a force balance control method for a highly dynamic MEMS resonant gyroscope. Background technique [0002] Micro-Electro-Mechanical System (MEMS) resonant gyroscopes have the advantages of small size, low power consumption, light weight, and strong anti-overload capability. They are widely used in automotive electronics, consumer electronics, and defense technology. [0003] The control system is an important part of the MEMS resonant gyroscope, which is mainly used to control the motion state of the gyroscope's micromachine and process the signal output by the capacitance detection circuit to output angular velocity information. On the one hand, the control system makes the gyroscope always work in resonance to ensure that the gyroscope has high sensitivity. On the other hand, the control system performs highly stable control and quadrature suppression on the amplitude of the gyro drive mode to ensure stable gyroscope measurement. S...

Claims

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Application Information

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IPC IPC(8): G01C19/5776
CPCG01C19/5776
Inventor 李崇宫宜辉侯人瑜郭亭亭
Owner OCEAN UNIV OF CHINA
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