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Mutual correlation-based method for evaluating effectiveness of surface shape measurement method

A measurement method and cross-correlation technology, applied in the field of surface shape measurement, can solve problems such as the influence of noise, and achieve the effect of reducing harshness

Active Publication Date: 2019-11-15
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The method of analyzing the point-to-point difference value of the surface shape error still uses the peak-to-valley value and the root mean square value to evaluate the point-to-point difference value surface shape. susceptible to noise

Method used

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  • Mutual correlation-based method for evaluating effectiveness of surface shape measurement method
  • Mutual correlation-based method for evaluating effectiveness of surface shape measurement method
  • Mutual correlation-based method for evaluating effectiveness of surface shape measurement method

Examples

Experimental program
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Effect test

Embodiment 1

[0042] like figure 1 As shown, this example discloses a method for evaluating the consistency of surface shape errors based on cross-correlation, and the specific implementation steps are as follows:

[0043]Step 1: Select the Fourier transform interferogram solution method as a mature surface shape measurement method to measure an optical surface 10 times.

[0044] Step 2: Average the measurement data obtained in step 1, and record the measurement result as S 1 (m,n), such as figure 2 shown.

[0045] Step 3: Measure the same optical element 10 times using the coordinate transformation interferogram solution method.

[0046] Step 4: Average the measurement data obtained in step 3, and record the measurement result as S 2 (m,n), such as image 3 shown.

[0047] Step 5: Based on the measurement result S obtained by using a mature surface shape measurement method 1 (m,n) As a reference, the measurement result S obtained by using the evaluated surface shape measurement met...

Embodiment 2

[0061] like figure 1 As shown, this example discloses a method for evaluating the consistency of surface shape errors based on cross-correlation, and the specific implementation steps are as follows:

[0062] Step 1: Select the Fourier transform interferogram solution method as a mature surface shape measurement method to measure 10 times on an optical surface added with random Gaussian noise with a root mean square value of 0.5λ.

[0063] Step 2: Average the measurement data obtained in step 1, and record the measurement result as S 1 (m,n), such as Figure 4 shown.

[0064] Step 3: Measure 10 times on the same optical surface to which random Gaussian noise with an RMS value of 0.5λ was added using the coordinate transformation interferogram solving method.

[0065] Step 4: Average the measurement data obtained in step 3, and record the measurement result as S 2 (m,n), such as Figure 5 shown.

[0066] Step 5: Take the measurement result S obtained by using the Fourier ...

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Abstract

The invention discloses a mutual correlation-based method for evaluating effectiveness of a surface shape measurement method, and belongs to the technical field of surface shape measurement. The mutual correlation-based method comprises the steps of selecting a mature surface shape measurement method to measure an optical surface for P times, and recording measurement results as S1(m, n); measuring the same optical component for P times by an evaluated surface shape measurement method, recording measurement results as S2(m, n); taking the S1(m, n) as a reference, and performing position matching on the measurement results S2(m, n) obtained by the evaluated surface shape measurement method; respectively substituting the S1(m, n) and the S2(m, n) into a normalization mutual correlation coefficient formula and an attenuation rate formula to obtain a normalization mutual correlation coefficient ncc and obtain attenuation rate A, and multiplying the normalization mutual correlation coefficient ncc by the attenuation rate A to obtain an error consistency coefficient SECC; and evaluating surface shape error consistency according to the error consistency coefficient SECC. The closer the SECC falls to 100%, the more consistency the evaluated surface shape measurement method moves towards to the selected mature surface shape measurement method, and the better the effectiveness of the evaluated surface shape measurement method is.

Description

technical field [0001] The invention relates to a method for evaluating the effectiveness of a surface shape measurement method based on cross-correlation, and belongs to the technical field of surface shape measurement. Background technique [0002] The surface error of optical components is an important part of the field of surface measurement technology. The correctness of the surface shape error reflects the validity of the surface shape measurement method. When a new surface shape measurement method is proposed, we generally evaluate the validity of the new surface shape measurement method by evaluating the consistency of the measurement results of the new surface shape measurement method with those of the mature surface shape measurement method . If the consistency is good, the new method is effective, and if the consistency is not good, the new method is invalid. [0003] The commonly used methods to evaluate the effectiveness of surface shape measurement methods a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G06F17/10
CPCG01B11/24G06F17/10
Inventor 郝群陶鑫刘洋胡摇
Owner BEIJING INSTITUTE OF TECHNOLOGYGY