Probe for semiconductor probe test bench

A test bench and semiconductor technology, applied in electronic circuit testing, measuring electricity, measuring devices, etc., can solve the problems of poor welding quality of finished pins, difference in test results, affecting test results, etc., so as to reduce twisting force and prevent puncture. Wafers, the effect of improving accuracy
CN110488177AActive Publication Date: 2019-11-22深圳市森美协尔科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
深圳市森美协尔科技有限公司
Publication Date
2019-11-22

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Abstract

The invention, which relates to the technical field of integrated circuits, discloses a probe for a semiconductor probe test bench. The probe includes a casing tube and a needle. The needle is installed at the bottom of the casing tube; and a positioning block is fixedly installed inside the casing tube. A slidingblock arranged in the casing tube is fixedly connected to the end of the needle; anda spring is installed between the positioning block and the sliding block. When the needle is impacted by a bearing bench, the needle is contracted to the inner side instantaneously and thus the stateof the needle is optimized from hard contact to the elastic contact, so that the needle can adapt to the wafer position and thus the needle is contracted or expanded to different positions automatically in use. Besides, the needle can be in contact with different positions of the wafer; and when the needle is impacted, the needle is contracted automatically to reduce the impact force; with the elastic force effect, the twisting force of the needle is reduced; and thus the needle is in a a vertical state all the time during use. At the same time, the needle can be in contact with different positions of the wafer, thereby improving the accuracy of the wafer during testing.
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Description

technical field

[0001] The invention relates to the technical field of integrated circuits, in particular to a probe for a semiconductor probe test bench. Background technique

[0002] The probe station is mainly used in the semiconductor industry, optoelectronic industry, integrated circuit and package testing. It is widely used in the research and development of precision electrical measurement of complex and high-speed devices, aiming to ensure quality and reliability, and reduce research and development time and device manufacturing process. cost.

[0003] In the integrated circuit industry chain, integrated circuit testing is the only industry that runs through the entire process of integrated circuit production and application. If the integrated circuit design does not pass the prototype verification test, it can be put into mass production: in mass production, if the wafer fails to pass The mid-test of the probe test bench cannot be packaged in the next process; and ...

Claims

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