Piezoelectric accelerometer

An accelerometer and piezoelectric technology, applied in the field of piezoelectric accelerometers, can solve the problems of torsional deformation of accelerometers, poor consistency, affecting the accurate measurement of accelerometers, etc., achieve high dynamic bandwidth, reduce torsional deformation, and enhance stability sexual effect

Active Publication Date: 2019-11-26
武汉敏声新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Traditional piezoelectric accelerometers are mostly single-axis accelerometers, which require three single-axis assemblies to detect three axes, which will inevitably lead to defects such as large volume and poor consistency; at the same time, the thickness of the mass block is much larger than the thickness of the beam, so that It will cause the torsional deformation of the accelerometer during work, which will greatly affect the accurate measurement of the accelerometer

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0019] see figure 1 , a piezoelectric accelerometer, comprising a rectangular frame 101, a cuboid mass block 102 is arranged in the rectangular frame 101, and the mass block 102 is fixed with a beam one 103, a beam two 104, and a beam three on a group of sides parallel to each other 105 and beam 4 106, beam 1 103, beam 2 104, beam 3 105 and beam 4 106 are all fixedly connected to the inner wall of the rectangular frame 101 at the end away from the mass block 102; beam 1 103 and beam 2 104 are mutually symmetrical and located at the same On the side, beam three 105 and beam four 106 are symmetrical to each other and are located on the other side parallel to the side of beam one 103. There is a gap between beam one 103 and beam two 104, and between beam three 105 and beam four 106. There are gaps, beam 1 103 and beam 3 105 are symmetrical to each other, beam 2 104 and beam 4 106 are mutually symmetrical; beam 1 103, beam 2 104, beam 3 105 and beam 4 106 are all provided with pie...

Embodiment 2

[0027] Such as figure 2 and image 3 As shown, a piezoelectric accelerometer includes a rectangular frame 101, a cuboid mass block 102 is arranged in the rectangular frame 101, and the mass block 102 fixes a beam one 103, a beam two 104, and a beam two 104 on a group of mutually parallel sides. Beam 3 105 and beam 4 106, beam 1 103, beam 2 104, beam 3 105 and beam 4 106 are all fixedly connected to the inner wall of the rectangular frame 101 at the ends far away from the mass block 102; beam 1 103 and beam 2 104 are mutually symmetrical and located On the same side, beam three 105 and beam four 106 are symmetrical to each other and are located on the other side parallel to the side where beam one 103 is located. There is a gap between beam one 103 and beam two 104, and between beam three 105 and beam four 106 There is a gap left, beam one 103 and beam three 105 are symmetrical to each other, beam two 104 and beam four 106 are mutually symmetrical; A metal electrode is respe...

Embodiment 3

[0037] Such as Figure 4 and Figure 5 As shown, a piezoelectric accelerometer includes a rectangular frame 101, a cuboid mass block 102 is arranged in the rectangular frame 101, and the mass block 102 fixes a beam one 103, a beam two 104, and a beam two 104 on a group of mutually parallel sides. Beam 3 105 and beam 4 106, beam 1 103, beam 2 104, beam 3 105 and beam 4 106 are all fixedly connected to the inner wall of the rectangular frame 101 at the ends far away from the mass block 102; beam 1 103 and beam 2 104 are mutually symmetrical and located On the same side, beam three 105 and beam four 106 are symmetrical to each other and are located on the other side parallel to the side where beam one 103 is located. There is a gap between beam one 103 and beam two 104, and between beam three 105 and beam four 106 There is a gap left, beam one 103 and beam three 105 are symmetrical to each other, beam two 104 and beam four 106 are mutually symmetrical; A metal electrode is resp...

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Abstract

The invention, which relates to the technical field of accelerometers, discloses a piezoelectric accelerometer which comprises a rectangular frame. A mass block is arranged in the rectangular frame. Abeam I, a beam II, a beam III and a beam IV are fixed to one group of parallel side surfaces of the mass block; the beam I and the beam II are symmetrical and arranged at the same side surface; the beam III and the beam IV are symmetrical and arranged at the other side surfaces parallel to the side surface where the beam I is located; and the beam I and the beam III are symmetric to each other and the beam II and the beam IV are symmetric to each other. Piezoelectric patches are arranged on the upper surfaces of the beam I, the beam II, the beam III and the beam IV; and metal electrodes are arranged at four corners of each piezoelectric patch. According to the invention, all beams are arranged at the two symmetrical sides of the mass block, so that the stability of the accelerometer is enhanced and the torsional deformation of the accelerometer under the working condition is reduced; the thickness of the mass block is consistent with the thickness of the beam, so that the stability ofthe accelerometer is enhanced and torsional deformation is reduced; and the high dynamic bandwidth can be obtained.

Description

technical field [0001] The invention relates to the technical field of accelerometers, in particular to a piezoelectric accelerometer. Background technique [0002] The inertial navigation system can measure the acceleration of the vehicle relative to the inertial coordinate system in real time through the accelerometer. At present, acceleration sensors mainly include piezoresistive, capacitive, piezoelectric, force balance, micromechanical thermal convection and micromechanical resonators. Piezoelectric accelerometers use materials with piezoelectric effect to measure acceleration. When the acceleration is input, the inertial force generated by the mass blocks deforms the beam and film structure, and generates charges on the surface. Through the charge amplifier or voltage amplifier, the The output is a charge or voltage proportional to the input acceleration. Piezoelectric acceleration sensor has wide dynamic range and good linearity, which is very suitable for shock and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/09
CPCG01P15/0922
Inventor 刘炎孙成亮胡博豪高超邹杨
Owner 武汉敏声新技术有限公司
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