Optical system and theory for checking aspheric mirror through conjugate correction

Abstract

The invention discloses an optical system and theory for checking an aspheric mirror through conjugate correction. Light emitted by a light-emitting point in detection equipment is imaged on a conjugate object point of a to-be-detected aspheric mirror through a correction lens; the to-be-detected aspheric mirror images the conjugate object point on a conjugate image point; and the conjugate imagepoint is used as an object point of an auto-collimation correction lens and light is returned along an auto-collimation original path of the auto-collimation correction lens. The spherical aberrationgenerated by the correction lens and the auto-collimation correction lens can correct the spherical aberration generated by the to-be-detected aspheric mirror at two conjugate points. The conjugate front and back points are related to a front region, a middle region and a back region, so that the aberration correction capability is greatly improved. The auto-collimation surface is formed on the auto-collimation correction lens and light passes through the to-be-detected aspheric mirror twice. The auto-collimation correction lens is arranged in front of the conjugate front point, so that the oblate spherical surface correction capacity is high. The correction lens is in light path connection with the auto-collimation correction lens, so that the correction capability is enhanced. The conjugate correction checking can test an aspheric mirror with a large aperture, a large relative aperture or even an ultra-large aperture and an ultra-large relative aperture.

Description

Technical field [0001] The invention relates to the inspection of aspheric mirrors with large apertures and large relative apertures, and even inspections of aspheric mirrors with super-large apertures and relatively large relative apertures, and specifically refers to the basic theory of testing aspheric mirrors based on the principle of conjugate correction. Background technique [0002] Aspheric lens optics includes the main parts of aberration theory, aspheric lens optical system design, auxiliary optical system design, processing technology and image quality evaluation. Among them, auxiliary optical system design serves as a bridge between aspheric lens optical system design and aspheric lens processing. The processing of designing aspherical mirrors is realized by the auxiliary optical system to inspect the aspherical mirrors. Looking back at the development history of auxiliary optical system design, aspheric lens inspection can be divided into two main types: [0003] 1. C...

AI Technical Summary

Problems solved by technology

The zero position compensation test is divided into two intervals, the front zero position compensation test and the rear zero position compensation test. The two intervals are irrelevant, which greatly reduces the compensation (correction) ability. Use zero position compensation to test large-diameter and large-relative apertures. Concave aspheric mirrors are difficult to achieve

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