a cryopump

Abstract

The invention discloses a cryogenic pump comprising a connecting flange, a hollow pump body sealingly connected with the flange, and a refrigerator sealingly connected with the pump body. The refrigerator includes a primary cold head extending into the inner cavity of the hollow pump body. and a secondary cold head, the cavity is provided with a radiation shield, the lower end of the radiation shield is connected to the primary cold head and an opening is provided at the upper end, and a primary baffle is arranged in the middle of the opening, and the secondary cooling A condensation adsorption assembly is arranged on the head, and a deflector is arranged on the inner wall of the radiation shield between the condensation adsorption assembly and the first-stage baffle plate. Shell; since the condensation adsorption component is no longer a multi-layer structure, the solid gas can condense and accumulate from the bottom of the condensation adsorption component to the top, and the bottom and sides of the condensation adsorption component are covered, which prevents the solid gas from falling into the radiation shield. , which can ensure that the pressure in the space is more stable.

Description

technical field [0001] The invention relates to the technical field of cryopumps, in particular to a cryopump. Background technique [0002] A cryopump is a vacuum pump that condenses or adsorbs gas on a low-temperature surface. Cryopumps can obtain a clean vacuum with the highest pumping rate and the lowest ultimate pressure, and are widely used in industries such as semiconductors and integrated circuits, vacuum coating, ion implanters, and space simulation. [0003] Such as figure 1 As shown, it is a typical cryopump structure, including flange 1, primary baffle plate 2, radiation shield 3, cold umbrella 4, cold head 5 and refrigerator 6. When the cryopump is in operation, the refrigerating machine 6 continues to generate cold energy, so that the radiation shield 3, the primary baffle plate 2 and the cold umbrella 4 are kept in a low temperature state. The refrigerator 6 is divided into a primary cold head and a secondary cold head. The primary cold head of the refrig...

AI Technical Summary

Problems solved by technology

The regeneration process of the cryopump may take several hours. Frequent regeneration restricts the application of the cryopump, and it is necessary to increase the pumping capacity of the cryopump

Moreover, the solid gas condensed on the surface of the cold umbrella of this structure may fall to the radiation shield when the condensation layer is too thick, because the temperature of the radiation shield is high, and the solid gas will vaporize, and the space The pressure will rise and the vacuum degree will become worse.

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