Vacuum evaporation device
An evaporation and vacuum technology, applied in the direction of vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problem that the distance between the evaporation source and the substrate cannot be adjusted, so as to reasonably control the thickness of the coating film and improve the quality of the coating film , to avoid the effect of too thick coating
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Embodiment 1
[0039] Such as Figure 1 ~ Figure 4 As shown, this embodiment provides a vacuum evaporation device, which is preferably applied to a PVD horizontal production line, and the vacuum evaporation device includes an evaporation chamber and a driving mechanism. A substrate 19 is arranged laterally in the evaporation chamber. The bottom plate 2 of the evaporation chamber is provided with a first through hole for the evaporation source 12 to pass through. The driving mechanism can drive the evaporation source 12 to pass through the first through hole and move up and down in the evaporation chamber to adjust the distance between the evaporation source 12 and the substrate 19 .
[0040] in particular:
[0041] see figure 2 , the driving mechanism includes a vertical guide rail 14 , a supporting plate 18 for carrying the evaporation source 12 , and a driving member for driving the supporting plate 18 to slide up and down along the vertical guiding rail 14 .
[0042] Further, the dri...
Embodiment 2
[0050] This embodiment also provides a vacuum evaporation device, which is basically the same as the vacuum evaporation device of Embodiment 1, and the similarities will not be repeated. The difference is (not shown in the figure): the upper end and the lower end of the vertical guide rail 14 are respectively The upper end bearing and the lower end bearing are connected, the upper end of the leading screw 15 is fixedly connected with the inner ring of the upper end bearing, and the lower end of the leading screw 15 is fixedly connected with the inner ring of the lower end bearing. The arrangement of the upper end bearing and the lower end bearing plays a role of limiting the operation of the lead screw 15, effectively improving the stability of the first lead screw 15 during operation.
Embodiment 3
[0052] This embodiment also provides a vacuum evaporation device applied to a PVD horizontal production line, which is basically the same as the vacuum evaporation device in Embodiment 1, and the similarities will not be repeated. The structure of the body has been further improved, that is, the evaporation chamber also includes a top plate and side plates, the bottom plate and the side plates are welded to each other to form a cavity with an upper end opening, and the top plate is detachably connected with the upper end opening of the cavity.
[0053] Further, the vapor deposition chamber also includes a top plate mounting block and a side plate mounting block, the top plate is detachably connected to the top plate mounting block, the side plate is detachably connected to the side plate mounting block, and the top plate mounting block can be connected to the side plate through fasteners. The board mounting blocks are connected so as to connect the top board to the upper openin...
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