Interdigital electrode chip
A technology of interdigitated electrodes and chips, which is applied in the field of microchannels, can solve the problems of inflexible detection positions, high cost of online detection technology, and limited detection objects of detection methods, and achieve the effects of improving chemical reaction efficiency and improving process conditions
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Embodiment 1
[0038] In Example 1, the interdigitated electrode chip can be connected to any position of the channel or pipeline (except the reaction module) of the microchannel reactor, and the online real-time monitoring of the chemical reaction process can be realized.
[0039] In Embodiment 2, the detection accuracy of the interdigital electrodes is improved by changing the material and structure of the interdigital electrode blocks. In this embodiment, the base of the interdigitated electrode block is made of single crystal silicon, and silicon dioxide is grown on the silicon surface with a thickness of 300nm. The interdigital electrode layers are chromium and gold in order from bottom to top, and the thicknesses are 10nm and 100nm respectively. The interdigitated electrode pairs have a line width of 30 μm, a finger length of 6.3 mm, and a line spacing of 30 μm, and there are 60 interdigitated electrode pairs in total.
Embodiment 2
[0040] The use temperature range of the interdigitated electrode block in Example 2 is -150-500° C., and the applicable temperature range is wider.
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