Method for controlling plurality of polycrystalline furnaces to run by one vacuum pump of polycrystalline furnace stage

Abstract

The invention relates to a transformation method for controlling a plurality of polycrystalline furnaces to run by one vacuum pump of a polycrystalline furnace stage. The transformation method comprises the following specific steps: (1) adjacent polycrystalline furnaces are connected in series before operation; (2) a valve V8 on the vacuum pump is opened and a valve V9 is closed in a normal operation state; (3) a V9 valve of a main vacuum pump planned to continue to run is opened and a label is hung during parallel connection operation; (4) a V8 valve of an auxiliary vacuum pump to be stoppedis closed, and a label is hung; (5) a V9 valve of the auxiliary vacuum pump is opened, and a label is hung; (6) the auxiliary pump planned to be stopped is closed; (7) when one of the polycrystallinefurnaces which are connected in parallel finishes running, the polycrystalline furnace which is shut down undergoes separation, and recovers to a normal running state; and (8) the V9 valves of the main pump and the auxiliary pump are closed, and labels are hung. The method directly reduces the use number of the vacuum pumps, fundamentally reduces the energy consumption, and reduces the fault occurrence frequency.

Description

technical field [0001] The invention belongs to the technical field of polycrystalline furnaces, and in particular relates to a method for controlling the operation of multiple polycrystalline furnaces by one vacuum pump on a polycrystalline furnace table. Background technique [0002] The operation period of the polycrystalline furnace is long (about 70 hours), but only in the heating stage (about 10 hours), which belongs to the gas replacement process. In the stages of melting, crystal growth, annealing, and cooling (about 60 hours), the air pressure in the furnace is stable, and the amount of gas entering and exiting is small. Therefore, the mode in which one vacuum pump supplies one polycrystalline furnace will cause a lot of waste of production capacity. As an indispensable device in gas transportation, the vacuum pump not only consumes a lot of energy during operation, but also belongs to the mechanical oil pump, which not only consumes a lot of lubricating oil during...

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Problems solved by technology

Therefore, the mode in which one vacuum pump supplies one polycrystalline furnace will cause a lot of waste of production capacity

As an indispensable device in gas transportation, the vacuum pump not only consumes a lot of energy during operation, but also belongs to the mechanical oil pump, which not only consumes a lot of lubricating oil during operation, but also produces sound and a lot of noise pollution due to mechanical action; therefore, in the fixed furnace platform In this case, it is necessary to increase the utilization rate and reduce the use of vacuum pumps

At the same time, the mode of one vacuum pump supplying one polycrystalline furnace will make each vacuum pump in working condition, and the vacuum pump will continue to operate for a long time. The slide valves have been in the friction process for a long time, which will reduce the life of the slide valves, and stop maintenance and other work. It will directly affect the efficiency of polycrystalline furnace equipment

When the vacuum pump fails, it can only be shut down for maintenance; not only will it directly affect the product quality, but also a major safety accident will occur if the gas cannot be effectively discharged

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