Defect detection device and defect detection method
A defect detection and defect technology, applied in measurement devices, optical testing of defects/defects, material analysis by optical means, etc., can solve problems such as easy generation of crosstalk signals, affecting the accuracy of defect detection results, and improve defect detection accuracy. , the effect of suppressing crosstalk
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[0047] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.
[0048] figure 2 is a schematic structural diagram of the defect detection device provided by the embodiment of the present invention, please refer to figure 2 , the device includes an illumination module 20 and an imaging detection module 30; the illumination module 20 is used to generate a detection beam 201, and makes the detection beam 201 incident on the detection surface of the product 40 to be tested; the imaging detection module 30 is used to detect whether the detection beam 201 Scattered imaging light ...
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