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Photoelectric detector photosensitive surface center accurate measurement device and method

A photodetector, precise measurement technology, applied in measurement devices, optical devices, semiconductor/solid-state device testing/measurement, etc., can solve the reference misalignment error, the reference that cannot be trimmed and processed, and the center deviation of the photosensitive surface that cannot be used. It can eliminate the deviation error, eliminate the reference conversion error, and meet the assembly requirements.

Active Publication Date: 2020-01-10
XIAN NORTH ELECTRO OPTIC TECH DEFENSE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

After the conversion and trimming of the measurement reference in the center of the photosensitive surface to the short tapered part of the ring photodetection part, the manufacturing reference of the device in the double four-quadrant photodetector is still used as the measurement reference, resulting in a reference non-coincidence error, resulting in misjudgment
If the manufacturing reference of the device is different from the detection reference of the center of the photosensitive surface of the device or the deviation is large, the manufacturing reference of the device cannot be used for the detection of the deviation of the center of the photosensitive surface, nor can it be used for the reference taper repair of the ring photodetector part. It is urgent to solve this problem

Method used

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  • Photoelectric detector photosensitive surface center accurate measurement device and method
  • Photoelectric detector photosensitive surface center accurate measurement device and method
  • Photoelectric detector photosensitive surface center accurate measurement device and method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] This embodiment provides a precise detection device for the photosensitive center of a photodetector, including a microscope, and a double-vertical-axis combined detection device used in conjunction with the microscope. The double-vertical-axis combined detection device includes an upper The vertical shaft cover 22, the vertical shaft sleeve 21 and the lower vertical shaft seat 20, the upper vertical shaft cover 22, the vertical shaft sleeve 21 and the lower vertical shaft seat 20 are all coaxial.

[0044] Implementation process of the present invention:

[0045]Place the lower vertical axis seat 20 in the double vertical axis combined detection device on the disc of the microscope and press it directly, then adjust the eyepiece system of the tool microscope, and adjust the reticle line of the eyepiece to the center of the cross section of the lower vertical axis seat 20 , after the adjustment, the trimmed and cut band-ring photodetector component 23 to be detected is i...

Embodiment 2

[0049] On the basis of Embodiment 1, this embodiment provides an accurate detection device for the photosensitive center of a photodetector. The upper vertical shaft cover 22 is a circular structure with openings at both ends, and the center is self-seeking from top to bottom. The positive load-bearing end face 12 and the upper vertical axis hole 24 . like Figure 7 shown.

[0050] The center of the vertical shaft sleeve 21 is, from top to bottom, the outer circle of the upper vertical shaft 26 , the self-centering conical surface 30 , the accommodation cavity, the lower vertical shaft hole 29 and the lower vertical bearing force end surface 1 28 . like Figure 8 shown.

[0051] The lower vertical shaft seat 20 includes a cylinder, a lower vertical bearing force end surface 2 32 and an aiming part end surface 12 arranged sequentially from top to bottom, and the cross section of the cylinder is the lower vertical shaft outer circle 31 . like Figure 9 shown.

[0052] Prin...

Embodiment 3

[0058] On the basis of Embodiment 2, this embodiment provides a precise detection device for the photosensitive center of a photodetector. The technical requirements for the design of the upper vertical shaft cover 22 are: the upper vertical shaft hole 24 and the self-aligning load-bearing end surface 225 The perpendicularity of the upper vertical shaft hole 24 is not more than 0.002mm, and the cylindricity of the upper vertical shaft hole 24 is not more than 0.003mm. It is made by grinding and pressing at one time, and the surface roughness is Ra0.1.

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Abstract

The invention provides a photoelectric detector photosensitive surface center accurate measurement device and method. The device comprises a microscope and further comprises a double-vertical-shaft combined detection device used in cooperation with the microscope, wherein the double-vertical-shaft combined detection device comprises an upper vertical shaft cover, a vertical shaft sleeve and a lower vertical shaft base which are sequentially connected from top to bottom, and the upper vertical shaft cover, the vertical shaft sleeve and the lower vertical shaft base are coaxial. Mainly in view of the problems of large deviation amount and coaxiality measurement of the double four-quadrant photoelectric detector photosensitive surface center relative to the assembly reference axis, automaticcenter determination and accurate positioning can be realized. According to the photoelectric detector photosensitive center accurate measurement method, the reference conversion error generated in the original scheme assembly process of the band ring photoelectric detector component is eliminated through trimming, the deviation error between the device manufacturing reference and the reference axis measured in the center of the photosensitive surface is eliminated, the assembly requirement of an out-of-tolerance device can be met, and the reference conversion error in the original assembly process can also be eliminated.

Description

technical field [0001] The invention specifically relates to a device and method for accurately measuring the center of a photosensitive surface of a photoelectric detector, which is used for detecting devices and similar structural parts that cannot be directly contacted for measurement. Background technique [0002] The dual four-quadrant photodetector is the core device for the laser seeker to capture the target. It is divided into 8 areas of the outer quadrant and the inner quadrant. The center of the cross line of the inner quadrant (also known as the center of the photosensitive surface) is the photosensitive surface The intersection point of the upper F-axis and G-axis is required to have a deviation of no more than 0.1mm relative to the device detection reference, which plays a decisive role in the coincidence adjustment of the optical zero position and the electrical zero position of the seeker. If the coaxiality of the center of the photosensitive surface relative ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66H01L31/18G01B11/27
CPCG01B11/27H01L22/24H01L31/18Y02P70/50
Inventor 张勇王斌马军伟李群王文仲赵宗哲韩文进
Owner XIAN NORTH ELECTRO OPTIC TECH DEFENSE