Preparation method of carbon nanotube parallel array

Abstract

The invention discloses a preparation method of a carbon nanotube parallel array. According to the method, a first substrate is inverted above a second substrate, the bulge structure of the first substrate is arranged towards the deposition plane of the second substrate; a carbon nanotube solution is introduced between the first substrate and the second substrate; the carbon nanotube solution forms a capillary bridge between the top of the bulge structure and the second substrate; at the moment, the bulge structure of the first substrate generates a pinning effect on a capillary bridge formedby the carbon nanotube solution, when the carbon nanotube solution is evaporated, carbon nanotube parallel arrays are deposited on the first substrate and the second substrate; after the carbon nanotube solution is completely evaporated, the purpose of preparing the carbon nanotube parallel array in a large area can be achieved by moving the first substrate through the parallel deposition plane and introducing the carbon nanotube solution again, the coverage area of the prepared carbon nanotube parallel array is controllable, and complete coverage of an effective area can be achieved.

Description

technical field [0001] The present application relates to the technical field of semiconductors, and more specifically, to a method for preparing parallel arrays of carbon nanotubes. Background technique [0002] Carbon nanotubes, also known as bucky tubes, are one-dimensional quantum materials with a special structure (the radial dimension is on the order of nanometers, the axial dimension is on the order of microns, and both ends of the tube are basically sealed). The traditional disordered network carbon nanotube film cannot take advantage of the one-dimensional anisotropy of carbon nanotubes, which increases the probability of scattering of carriers during the transport process in the carbon nanotube film, thereby reducing the channel material's mobility, which adversely affects device performance. [0003] Therefore, the preparation method of parallel arrays of carbon nanotubes with highly uniform orientation is a hotspot of research at present. The preparation method ...

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Problems solved by technology

[0004] In order to solve the above technical problems, this application provides a method for preparing parallel arrays of carbon nanotubes, which has solved the problem that the preparation area of ​​parallel arrays of carbon nanotubes is limited and cannot be completely covered in the effective area

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