Micro 3D topography multi-channel measuring device and method

Abstract

The invention particularly relates to a micro 3D topography multi-channel measuring device and method. The device comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module, a multi-channel spectrum gray level image collection module, a longitudinal height adjustable sample platform and an image display and analysis module. The device can obtainthe micro 3D topography of a sample without mechanical movement. By adopting the method, micro 3D topography measurement with high lateral resolution, high longitudinal measurement accuracy and largelongitudinal measurement range at a millimeter order can be realized.

Description

technical field [0001] The invention belongs to the field of optical microscopic imaging, and relates to a microscopic 3D shape measurement device and method, in particular to a multi-channel-based microscopic 3D shape measurement device and method. Background technique [0002] There are many deficiencies in the existing microscopic three-dimensional shape measurement technology, such as the small observation range of scanning microscopic detection and low environmental anti-interference ability; the interferometric method requires a large number of axial scans, which limits the measurement efficiency of the method; the traditional confocal microscopic measurement of single point Mechanical scanning makes it difficult to achieve real-time and fast three-dimensional measurement; although parallel confocal measurement technology realizes simultaneous detection of sample points on the same confocal section, it still requires longitudinal scanning or mechanical scanning of auxil...

AI Technical Summary

Problems solved by technology

[0002] There are many deficiencies in the existing microscopic three-dimensional shape measurement technology, such as the small observation range of scanning microscopic detection and low environmental anti-interference ability; the interferometric method requires a large number of axial scans, which limits the measurement efficiency of the method; the traditional confocal microscopic measurement of single point Mechanical scanning makes it difficult to achieve real-time and fast three-dimensional measurement; although parallel confocal measurement technology realizes simultaneous detection of sample points on the same confocal section, it still requires longitudinal scanning or mechanical scanning of auxiliary equipment, multiple starts and stops of the scanning process, and The vibration of mechanical scanning limits its measurement efficiency and measurement accuracy to a certain extent

For example, the existing application number CN201510922156.X solves the problem of layer-by-layer longitudinal scanning of the traditional parallel confocal measurement technology, but it still needs to collect grayscale images of the sample before and after the focal plane, and there is still a mechanical start-stop movement

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