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Probe false touch prevention method, device and system

An anti-mistouch, probe technology, applied in the field of scanning imaging, can solve the problem of not being able to monitor the distance from the sample to the probe in real time

Active Publication Date: 2022-05-24
SHENZHEN INST OF TERAHERTZ TECH & INNOVATION CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of this, the embodiment of the present invention provides a method, device and system for preventing accidental touch of a probe, so as to solve the problem that the distance from the sample to the probe cannot be monitored in real time

Method used

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  • Probe false touch prevention method, device and system
  • Probe false touch prevention method, device and system
  • Probe false touch prevention method, device and system

Examples

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Embodiment 1

[0043] like figure 1As shown, it is a schematic flowchart of the method for preventing accidental touch of a probe provided by Embodiment 1 of the present invention. This embodiment can be applied to an application scenario of probe scanning imaging of a near-field scanning imaging device, and the method can be executed by a control device, and the control device can be a server, a smart terminal, a tablet, a PC, or the like; in this embodiment of the present invention, the The control device is described as the execution subject, and the method specifically includes the following steps:

[0044] S110, adjusting the distance measuring light spot of the distance meter and the sample holder to the first test distance directly below the needle tip of the probe;

[0045] A near-field scanning imaging device that performs scanning imaging according to the principle of terahertz near-field imaging includes a sample holder for placing the sample, a probe for receiving terahertz ligh...

Embodiment 2

[0061] like figure 2 Shown is a schematic flowchart of the method for preventing accidental touch of a probe provided by the second embodiment of the present invention. On the basis of the first embodiment, this embodiment also provides a horizontal detection process of the sample holder and the sample during near-field scanning imaging, so as to prevent the probe from touching the sample during the scanning process. Specifically, the method includes:

[0062] S210, adjusting the distance measuring light spot and the sample holder of the distance meter to the first test distance directly below the needle tip of the probe;

[0063] In order to prevent the probe from touching the sample during the scanning process due to the unevenness of the sample holder, before the near-field scanning imaging device scans the sample, the ranging spot of the rangefinder and the sample holder can be adjusted to the position of the probe. Directly below the tip of the needle at the first test...

Embodiment 3

[0075] like image 3 Shown is a schematic flowchart of the method for preventing accidental touches of a probe provided by Embodiment 3 of the present invention. On the basis of Embodiment 1 or Embodiment 2, this embodiment also provides a method for preventing accidental contact of the probe during near-field scanning imaging, so as to prevent the probe from touching the sample during scanning. Specifically, the method includes:

[0076] S310. During the scanning and imaging process, measure the distance of each of the scanning points by the range finder to obtain the distance between each of the scanning points and the probe tip;

[0077] During the scanning imaging process, the ranging spot of the rangefinder and the sample holder are located at the scanning distance directly below the tip of the probe; and during the scanning process, the control device controls the movement of the sample placed on the sample holder through the motor. Move point by point. The control de...

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Abstract

The present application belongs to the field of scanning imaging technology, and provides a method, device and system for preventing accidental contact of a probe. The method includes: adjusting the distance measuring spot and the sample holder of the range finder to the position directly below the needle tip of the probe for the first test distance; control the horizontal movement of the sample rack and randomly measure the distance of N detection points that are not on the same line through the rangefinder; if the first error value between the distance corresponding to each detection point and the first test distance is less than the preset threshold , then adjust the ranging spot and the sample holder to the second test distance directly below the needle tip of the probe; control the movement of the sample holder with the sample placed according to the preset scanning imaging range, and use the rangefinder to adjust several preset If it is determined that the sample is flat, adjust the ranging spot and the sample holder to the scanning distance directly below the needle tip of the probe to perform imaging scanning. The embodiment of the present application solves the problem that the distance from the sample to the probe cannot be monitored in real time.

Description

technical field [0001] The present invention relates to the technical field of scanning imaging, and in particular, to a method, device and system for preventing accidental touch of a probe. Background technique [0002] At present, there have been relatively mature researches on terahertz near-field imaging methods, such as the use of probe technology and laser self-mixing effect to detect the near-field terahertz signal of the target, thereby realizing high-resolution imaging. Terahertz near-field imaging is limited by the attenuation of detection distance and lost field information, and the resolution of near-field imaging is mostly sub-wavelength. Most of the existing terahertz near-field imaging devices use near-field probes to detect the evanescent field information on the sample surface within a half-wavelength (about 200 μm) distance. Since the detection distance is too small, once the sample is tilted at a small angle during the scanning process, there is a risk of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/3581G01N21/01G01B11/14
CPCG01N21/3581G01N21/01G01B11/14
Inventor 薛占强郭翠潘奕
Owner SHENZHEN INST OF TERAHERTZ TECH & INNOVATION CO LTD