Measurement mechanism

Abstract

The invention relates to a measurement mechanism. The measurement mechanism comprises a base, a rotary table, a sliding seat, a linear driving mechanism, a rotary driving mechanism, a swinging table and an autocollimator; the base comprises a base body and a beam which are connected; the rotary table is arranged on the base body; the power output end of the linear driving mechanism is connected with the sliding seat; the linear driving mechanism drives the sliding seat to slide relative to the beam; the rotary driving mechanism is arranged at one side of the sliding seat, which faces away fromthe beam; the swinging table is connected to the power output end of the rotary driving mechanism; the rotary driving mechanism drives the swinging table to swing relative to the sliding seat, and aplane of the swinging table, which swings relative to the sliding seat, is parallel to a plane where the sliding seat is positioned; the autocollimator is arranged on the swinging table; the curved surface topography of a to-be-measured curved surface structure can be reduced by carrying out analysis according to original measured data and finally, curved surface quality of the to-be-measured curved surface structure is evaluated, so that a problem that the autocollimator is unsuitable to carry out measurement on a curved surface with a large curvature change is solved.

Description

technical field [0001] The invention relates to the technical field of detection equipment, in particular to a measuring mechanism. Background technique [0002] Self-collimation refers to the fact that the object on the focal plane of the objective lens emits a parallel beam due to the imaging effect of the objective lens. After the beam is reflected by the reflective surface and enters the objective lens again, it can still form a real image of the object on the plane where the object is located. An autocollimator is a measuring instrument that uses the principle of self-collimation of light to convert angle measurements into linear measurements. [0003] Autocollimator is a measuring instrument with high measurement accuracy. It is widely used in small angle measurement, flatness measurement of flat panel, straightness and parallelism measurement of guide rail, etc. However, its own measurement range is very small, and the mainstream The measurement range of the autocoll...

AI Technical Summary

Problems solved by technology

[0003] Autocollimator is a measuring instrument with high measurement accuracy. It is widely used in small angle measurement, flatness measurement of flat panel, straightness and parallelism measurement of guide rail, etc. However, its own measurement range is very small, and the mainstream The measurement range of the autocollimator is about ±100 arc seconds, and the measurement range of the metrology-grade autocollimator is even smaller

Since the measurement accuracy of an autocollimator with a large measurement range will decrease by an order of magnitude, when the autocollimator is applied to the measurement of spherical or free-form surfaces, it is not suitable for measuring surfaces with large curvature changes. In particular, the measured The radius of curvature of the curved surface is large, generally above 1000mm, and the diameter of the curved surface to be measured is small, at this time, the central angle is in the range of hundreds of arc seconds

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