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Microperation device and method based on capillary force

A capillary force and micro-manipulation technology, applied in the manufacture of electrical components, electrical solid-state devices, semiconductor/solid-state devices, etc., can solve the problems of light damage, electrostatic damage, micro-device damage, etc. Easy-to-use effects

Pending Publication Date: 2020-02-07
SHAANXI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, in the prior art, the contact micro-manipulation method is easy to cause damage to the micro-device, while the non-contact micro-manipulation device based on the field force is easily disturbed by external factors, and usually has special requirements for the device material, such as based on the magnetic field force, usually requires The micro-device itself is magnetic or magnetized; based on electrostatic force, it will cause electrostatic damage; based on optical tweezers, it will cause optical damage

Method used

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  • Microperation device and method based on capillary force
  • Microperation device and method based on capillary force
  • Microperation device and method based on capillary force

Examples

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Embodiment

[0046] see figure 1 , a Y-axis electric displacement stage 26 is fixed on the vibration-damping table 23, and a first connecting plate 25 is fixed on the load block of the Y-axis electric displacement stage 26, and the first connecting plate 25 is fixed with an X-axis electric displacement by a hexagon socket bolt. Table 19, the first L-shaped connecting plate 18 is fixed on the loading block of the X-axis electric displacement stage 19 through the inner hexagonal bolt, and the first L-shaped connecting plate 18 is fixed with the Z-axis electric displacement stage 17 through the inner hexagonal bolt, and the Z-axis The loading block of the electric displacement stage 17 is fixed with a second connecting plate 16 by bolts, and the second connecting plate 16 is fixed with an injection needle holder 15 through an inner hexagonal bolt, and the needle holder 15 is provided with an injection needle 13. Multiple needles can be set;

[0047] The loading block of the X-axis electric t...

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Abstract

The invention discloses a microoperation device and method based on the capillary force and belongs to the technical field of microoperation. A liquid drop generation mechanism, a moving operation mechanism and a top view mechanism are all arranged on a vibration reduction table. The influence of external vibration on operation of the micro device can be reduced by operating on the vibration reduction table, so efficient and high-precision picking, transferring and releasing of the micro device are completed under the action of capillary force. A micro propelling pump, an industrial camera anda three-dimensional electric displacement platform can be integrally controlled through a computer, and automatic control over the operation process of the micro device can be achieved, the micro-operation device based on the capillary force is simple in structure, capable of achieving automatic control, convenient to operate and easy to achieve industrial production.

Description

technical field [0001] The invention belongs to the technical field of micro-operation equipment, and in particular relates to a micro-operation device and method based on capillary force. Background technique [0002] With the emergence of smart devices and wearable devices, the development of electronic products in the direction of miniaturization, multi-function and flexibility has been further promoted, and people have also put forward higher and higher requirements for the quality of electronic products. However, due to the scale effect, the operation of microdevices becomes very challenging. At present, common micro-manipulation technologies are mainly divided into contact and non-contact: contact micro-manipulation methods are based on piezoelectricity, vacuum, etc. Non-contact micro-manipulation methods are based on field forces, such as electric fields, magnetic fields, light, and sound waves. [0003] However, in the prior art, the contact micro-manipulation meth...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/683H01L21/67
CPCH01L21/67253H01L21/6835H01L2221/68363H01L2221/68381
Inventor 常博王彬开周权
Owner SHAANXI UNIV OF SCI & TECH
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