Capacitive distance sensor

A distance sensor, capacitive technology, used in converting sensor output, using electromagnetic/magnetic devices to transmit sensing components, instruments, etc., to achieve simple calibration and signal evaluation, reduce manufacturing and installation requirements, and increase the effect of measurement rate

Active Publication Date: 2020-02-18
HEXAGON TECH CENT GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Furthermore, measurement errors due to capacitive edge effects (i.e. effects due to deviations from the theoretically ideal case of an infinitely extending capacitive region) can only be compensated for by significant calibration effort

Method used

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no. 1 approach

[0055] Figure 1b A first embodiment of a capacitive distance sensor 4 according to the invention is shown in a schematically simplified manner, with which any inclination or deviation. For this purpose, the distance sensor 4 according to the invention has, in addition to the sensor electrode 2, an inclination compensation electrode 1 which is separate from the sensor electrode 2 and is divided in this way into two parts 1a, 1b, that is, each of these components is assigned to and separated from one end of the sensor electrode 2 . Both electrodes 1 , 2 lie in the plane 53 . The compensation electrodes 1a and 1b respectively form a capacitance C1 or C2 with the object surface 51 . Deviating from this illustration, embodiments are also possible in which the plane 53 is slightly curved or the sensor and compensation electrodes 1 , 2 , 3 are slightly curved such that, for example, the three electrodes 1 , 2 , 3 form a circular arc, depending on the technical field of applicatio...

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Abstract

A capacitive distance sensor. A capacitive distance sensor (4, 4y1, 4y2, 4z) for determining distances (d, dy1, dy2, dz) from an object (17, 50) is disclosed, wherein the distance sensor (4, 4y1, 4y2,4z) has at least one sensor electrode (5) and at least one compensation electrode (1, 2, 2a, 2b, 3). Deviations from an ideal parallel orientation of the distance sensor (4, 4y1, 4y2, 4z)and object (50) and/or errors caused by capacitive edge effects can be compensated by means of the compensation electrode (1, 2, 2a, 2b, 3).

Description

technical field [0001] The invention relates to capacitive distance sensors, methods and computer program products for determining distances using such distance sensors. Background technique [0002] Capacitive sensors for precise distance measurement to objects are known from the prior art. Such sensors are used, for example, in order to measure the distance between two parts of a precision bearing that can move relative to each other, or to monitor the gap between two parts, for example the space between a roller cage and the balls or gap. Such precision bearings are used, for example, in precision measuring machines or high-precision instruments, such as theodolites, laser trackers or laser scanners, or also in precision manufacturing machines for the precise manufacture of workpieces. [0003] For example, in US 9,435,645 B2 the use of one or more capacitive distance sensors in the bearing of a 3-axis coordinate measuring machine (CMM) is described in order to determin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02G01B7/14G01D5/241
CPCG01B7/023G01B7/14G01B7/144G01D5/2417G01D5/241
Inventor 马塞尔·罗纳L·鲍曼M·赖特雷尔C·艾斯利阿尔贝托·塔雷佐
Owner HEXAGON TECH CENT GMBH
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