Meta-material-based filter-free infrared thermal radiation gas concentration sensor
A technology of gas concentration and thermal radiation, which is applied in the direction of electric radiation detectors, material analysis, and material analysis through optical means, can solve problems such as inappropriate processing processes, increase industrial costs, and reduce device integration, so as to reduce Industrial cost, simple and compact structure, and the effect of improving integration
Active Publication Date: 2020-03-17
SHANGHAI JIAO TONG UNIV
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Problems solved by technology
In this solution, the detector is equipped with a filter. Although the filter ensures the measurement process, it reduces the integration of the device, and the filter that needs to be additionally manufactured and installed does not match the processing flow, which increases the industrial cost.
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[0039] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0040] In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device Or elements must hav...
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Abstract
The invention provides a meta-material-based filter-free infrared thermal radiation gas concentration sensor comprising a housing, side walls, an antireflection film, a support frame, a detector chip,a circuit board, a thermal radiation chip, a heater, a temperature control chip and pins. The housing is divided into a first air chamber and a second air chamber by the antireflection film arrangedin the housing; the first air chamber is supported by the side walls arranged at the two sides in the housing; an outer air hole is formed in the housing which defines the first air chamber; and innerair holes are formed in the antireflection film. The support frame is arranged in the second air chamber; one or more detector chips are arranged on the support frame; the thermal radiation chip is opposite to the detector chip and is connected with the heater; and the heater is connected with the temperature control chip. The circuit board is arranged in the second air chamber and is connected with the detector chip, the thermal radiation chip, the temperature control chip and pins; and the pins are arranged outside the housing. The sensor being made of the meta material has advantages of high integration, low cost, and wide application range.
Description
technical field [0001] The invention relates to the field of gas concentration monitoring, in particular to a filterless infrared thermal radiation gas concentration sensor based on metamaterials. Background technique [0002] With the improvement of people's living standards and the world's increasing attention to environmental protection, the monitoring of air pollution and industrial waste gas has gradually been paid attention to. Infrared gas measurement is a detection method with high sensitivity, good stability and wide applicability. It has been widely used in chemical industry, coal, metallurgy, electric power, etc., and the non-dispersive infrared gas sensor is easy to integrate because of its simple structure. , stable performance and other advantages are favored by people. The current non-dispersive infrared sensor is often composed of a wide-spectrum light source, a gas chamber and a detector with a filter. Although the filter ensures the measurement process, it...
Claims
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IPC IPC(8): G01N21/3504G01N21/01G01J5/10G01J5/12
CPCG01J5/10G01J5/12G01N21/01G01N21/3504
Inventor 赵长颖陈轶康王博翔黄天成
Owner SHANGHAI JIAO TONG UNIV