Filterless Infrared Thermal Radiation Gas Concentration Sensor Based on Metamaterials
A technology of gas concentration and thermal radiation, which is applied in the direction of electric radiation detectors, material analysis, and material analysis through optical means, can solve the problems of reducing device integration, processing process incompatibility, and increasing industrial costs, etc., to improve Integrativeness, cheap broadband photodetectors, and the effect of reducing industrial costs
Active Publication Date: 2021-10-26
SHANGHAI JIAOTONG UNIV
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Problems solved by technology
In this solution, the detector is equipped with a filter. Although the filter ensures the measurement process, it reduces the integration of the device, and the filter that needs to be additionally manufactured and installed does not match the processing flow, which increases the industrial cost.
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[0039] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0040] In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device Or elements must hav...
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Abstract
The invention provides a filterless infrared thermal radiation gas concentration sensor based on metamaterials, comprising a casing, a side wall, an anti-reflection film, a support frame, a detector chip, a circuit board, a thermal radiation chip, a heater, a temperature control Chip and pins; the casing is divided into a first air chamber and a second air chamber by an anti-reflection film arranged inside, the first air chamber is supported by the side walls arranged on both sides of the casing, and the casing enclosing the first air chamber is provided with An outer air hole, an inner air hole is arranged on the anti-reflection film, a support frame is arranged in the second air chamber, and one or more detector chips are arranged on the support frame, and a heat radiation chip is arranged on the opposite side of the detector chip, and the heat radiation chip is connected to the heater The heater is connected to the temperature control chip, the circuit board is arranged in the second air chamber, the circuit board is connected to the detector chip, the heat radiation chip, the temperature control chip and the pins, and the pins are arranged outside the casing. The invention adopts metamaterial, has high integration, low cost and wide application range.
Description
technical field [0001] The invention relates to the field of gas concentration monitoring, in particular to a filterless infrared thermal radiation gas concentration sensor based on metamaterials. Background technique [0002] With the improvement of people's living standards and the world's increasing attention to environmental protection, the monitoring of air pollution and industrial waste gas has gradually been paid attention to. Infrared gas measurement is a detection method with high sensitivity, good stability and wide applicability. It has been widely used in chemical industry, coal, metallurgy, electric power, etc., and the non-dispersive infrared gas sensor is easy to integrate because of its simple structure. , stable performance and other advantages are favored by people. The current non-dispersive infrared sensor is often composed of a wide-spectrum light source, a gas chamber and a detector with a filter. Although the filter ensures the measurement process, it...
Claims
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IPC IPC(8): G01N21/3504G01N21/01G01J5/10G01J5/12
CPCG01J5/10G01J5/12G01N21/01G01N21/3504
Inventor 赵长颖陈轶康王博翔黄天成
Owner SHANGHAI JIAOTONG UNIV