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Micro-electrolytic wire cutting polishing method using phosphoethanol mixed electrolyte

A phosphate ethanol and electrolyte technology, applied in electrochemical processing equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of poor surface quality and low processing efficiency

Active Publication Date: 2021-02-05
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

[0006] Aiming at the problems of poor surface quality and low processing efficiency in the microstructure, the present invention proposes a micro-electrolytic wire-cut polishing method using phosphoethanol mixed electrolyte, aiming to process microstructures with high surface quality in one step

Method used

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  • Micro-electrolytic wire cutting polishing method using phosphoethanol mixed electrolyte
  • Micro-electrolytic wire cutting polishing method using phosphoethanol mixed electrolyte
  • Micro-electrolytic wire cutting polishing method using phosphoethanol mixed electrolyte

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Embodiment Construction

[0017] The phosphoric acid ethanol solution mixed solution of the electrolyte used in the fine electrolytic wire cutting polishing in the present invention is characterized in that: the solute in the mixed solution is phosphoric acid and ethanol, and the solvent is water; the content of each component in the mixed solution is calculated by mass fraction, The phosphoric acid content is 10%-30%, the deionized water content is 10-20%, and the rest is ethanol.

[0018] The micro-electrolytic wire cutting polishing method using the phosphoric acid ethanol mixed solution as the electrolyte is characterized in that it includes the following process: measuring the polarization curve of the metal in the phosphoric acid ethanol mixed solution, that is, the relationship curve between current density and voltage. The voltage of the pulse power supply 4 is set in the super-passivation zone 12 of the polarization curve, and the potential decreases successively from near to far from the elect...

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Abstract

The invention relates to a fine electrolytic wire cutting and polishing method using phosphoethanol mixed electrolyte, belonging to the technical field of electrochemical processing. Its main features are: use phosphoethanol solution as the electrolyte to electrolytically process metal materials, use wire electrodes to simultaneously cut micro-slits and polish the side walls of the slits, combine electrolytic wire cutting and electro-polishing, and complete the microstructure in one step Advanced processing and surface treatment greatly improve the surface quality and processing efficiency of products. Ethanol with a lower density makes the discharge of air bubbles and other electrolytic products in the processing gap less resistant. The rapid discharge of electrolytic products and the timely renewal of the electrolyte make the electric field distribution in the processing gap more uniform and the surface of the microstructure smoother. .

Description

technical field [0001] The invention relates to a fine electrolytic wire cutting and polishing method using phosphoethanol mixed electrolyte, belonging to the technical field of electrochemical processing. Background technique [0002] The size of MEMS is very small, and its internal structure and components are usually at the micron or even nanometer level. Due to the high precision requirements of the microstructure and the good mechanical properties of the materials used to process the microstructure, the processing is very difficult, and traditional machining is difficult to achieve. Generally, special processing methods are used for processing. This kind of special processing method is suitable for processing various special materials with high hardness, strong corrosion resistance and high melting point. Common special processing methods include laser processing, micro-EDM, micro-electrolytic machining, and ion beam processing. Among them, the electrolytic machining ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23H3/08B23H3/00
CPCB23H3/00B23H3/08
Inventor 曾永彬李守业杨涛杭雨森
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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