Resonance miniature electric field sensor with adjustable sensitivity

Abstract

The invention provides a resonance miniature electric field sensor with adjustable sensitivity. The resonance miniature electric field sensor comprises a substrate, a support beam, an electric field introduction unit, a micro-lever structure, a resonance unit, an excitation electrode, a vibration detection electrode and a tuning electrode, the electric field introduction unit comprises an electricfield induction electrode, an electric field input electrode, an electric field bias electrode and a driving structure; the micro-lever structure comprises a lever beam, a force application beam anda stress beam; the resonance unit comprises a plurality of resonance structures which are arranged in sequence to form a symmetrical structure. The excitation electrode drives the resonance unit; thevibration detection electrode detects the vibration amplitude of the vibration generated by the resonance unit. On the basis of guaranteeing that the output signal intensity of the sensor is within areasonable range, the micro-lever structure is combined, high-sensitivity, wide-band and large-dynamic-range electric field measurement is achieved, and the sensor has the advantages of being good inlinearity and the like.

Description

technical field [0001] The disclosure relates to the field of sensors in the electronics industry, in particular to a resonant miniature electric field sensor with adjustable sensitivity. Background technique [0002] Electric field sensors are widely used in many fields such as aerospace, meteorological detection, power system, industrial production, environmental monitoring, etc., and play an important role in safety assurance and scientific research. For different application fields, the properties of the electric field to be measured (such as the frequency, intensity, direction and duration of the electric field to be measured, etc.) and the working environment of the sensor (such as the temperature and state of the environment where the sensor is located) are different. Therefore, the types of electric field sensors required for measurement are also different. At present, many electric field measurement principles and sensor processing technologies have been used in th...

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Problems solved by technology

However, due to the small size of the device, the miniature electric field sensor has problems such as weak signal and low resolution.

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