High-power flip LED chip with temperature monitoring function and preparation method thereof
A LED chip, high-power technology, applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve the problems of LED chip failure, unable to effectively judge local overheating, etc., achieve real-time monitoring, solve the effect of local overheating failure problems
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[0038] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0039] Embodiments of the present invention propose a method for preparing a high-power flip-chip LED chip with temperature monitoring. In the following method, wafer refers to the structure of the intermediate step before the LED chip is completed;
[0040] The method comprises the steps of:
[0041] Step 1, using MOCVD equipment to sequentially grow N-GaN layer 2, quantum well layer 3 and P-GaN layer 4 on the sapphire substrate layer 1 to form a complete LED epitaxial structure;
[0042] By changing the temperature and the composition of In and Al in the growth process of the quantum well layer 3, the emission wavelength can be changed;
[0043] Step 2, using the positive photoresist mask method to make a mask pattern, the blank area on the mask pattern corresponds to the channel to the N-GaN layer 2, and the N-GaN layer corresponding to the blank area of ...
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