A method and device for fabricating a PDMS-based flexible grating

Abstract

The invention discloses a method and equipment for making a flexible grating based on PDMS. The equipment includes a base, a stainless steel ring and a stainless steel ring, grooves are arranged on the base, the stainless steel ring includes a first stainless steel ring and a second stainless steel ring, and the stainless steel ring , The first stainless steel ring and the second stainless steel ring are located above the base, outside the groove and evenly surround the groove, the first stainless steel ring is adjacent to the inner side of the stainless steel ring, and the second stainless steel ring is adjacent to the outer side of the stainless steel ring . The production method is as follows: put the master grating into the groove and cover the gap between them; configure PDMS solution; spin coating, evenly spin coat the PDMS solution on the entire base; put the stainless steel ring on the corresponding position; The first stainless steel circle and the second stainless steel circle are placed on the corresponding positions; the PDMS solution is slowly poured into the area between the first stainless steel circle and the second stainless steel circle; heat curing; peeling off the film. The invention can greatly improve the success rate of production and reduce the possible damage of the film in the process of peeling off the film.

Description

technical field [0001] The invention belongs to the technical field of optical thin films, and relates to a method and equipment for manufacturing a PDMS-based flexible grating. Background technique [0002] At present, the applications of gratings are mostly concentrated at the nanoscale. As a new type of optical component, nanoscale gratings have important applications in photonic crystals, biosensing, solar energy, and data storage. In recent years, traditional grating manufacturing methods, such as mechanical scribing, electron beam exposure and holographic ion beam etching, have high production costs, long cycle times, and are difficult to manufacture in large areas, and these methods can only process hard gratings. It is difficult to manufacture flexible nano-gratings, which limits the further development of nano-imprinting, and the use of flexible nano-imprinting technology can avoid "head-to-head" with hard templates during imprinting, which can greatly reduce the pr...

AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to provide a flexible grating manufacturing device and a method for using the device to make a PDMS-based flexible grating. The method is simple, low in cost, short in cycle, less in process, and controllable in process, and solves the problem of the current manufacturing efficiency of flexible gratings. Problems with low and low success rates

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