A multi-purpose silicon carbide wafer transport manipulator
A technology of silicon carbide crystals and manipulators, applied in the direction of manipulators, manufacturing tools, chucks, etc., can solve the problems that manipulators cannot meet various types of grasping in small spaces, unsafe state of manipulator pick-and-place, single-functional grasping, etc., to achieve Easy disassembly, easy control, high-speed transmission effect
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[0042] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0043] It should be noted that the experimental methods described in the following embodiments, unless otherwise specified, are conventional methods, and the reagents and materials, if not otherwise specified, can be obtained from commercial sources; in the description of the present invention, The terms "landscape", "portrait", "top", "bottom", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", The orientation or positional relations...
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