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Electrostatic scanning micromirror

A scanning micromirror and electrostatic technology, applied in the direction of optical components, optics, instruments, etc., can solve the problems of difficult to pick up the micromirror in the packaging stage, affect the deflection angle of the micromirror, and the limited number of comb teeth, etc., to achieve large driving force and enhanced drive force, improve the effect of accuracy

Pending Publication Date: 2020-04-21
无锡微视传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The applicant aims at the prior art, the electrostatic scanning micromirror is limited by the length of the rotating shaft, and the number of comb teeth is limited, which leads to the limitation of the maximum driving force during operation, affects the deflection angle of the micromirror, and is difficult to pick up and fix in the packaging stage of the micromirror. and other shortcomings, provide a new type of electrostatic scanning micromirror, which can greatly increase the number of comb groups, increase the driving force, increase the maximum deflection angle of the micromirror, and reduce the packaging stage without lengthening the shaft and ensuring the strength of the shaft. Picking and fixing difficulty, improving yield and reliability

Method used

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  • Electrostatic scanning micromirror
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  • Electrostatic scanning micromirror

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Such as figure 1 with figure 2 As shown, the electrostatic scanning micromirror of the present invention comprises the micromirror body of the top and the bonded base plate 13 below, and the micromirror body comprises a frame 1 and a mirror surface 2, and the frame 1 back side is fixed on the bonded base plate 13, and the bonded base plate 13 bottom surface Flat, because the bottom of the bonding base 13 is flat, compared with directly fixing the micromirror on the PCB, the bonding base 13 can be glued and fixed on the PCB more stably and conveniently. The bonding substrate 13 is made of glass, silicon, metal and other materials, and the frame 1 and the mirror surface 2 are made of silicon material or metal alloy. From left to right, the frame 1 is divided into a driving part 1-1 on the left, a deflecting part 1-2 in the middle, and a feedback part 1-3 on the right. The three parts are electrically isolated by the isolation groove 5 and are not connected to each other...

Embodiment 2

[0037] Such as image 3 As shown, the middle part of the bonding base plate 13 is processed into a groove. When the mirror 2 deflects, enough deflection space can be provided for the edge of the mirror 2, preventing the edge of the mirror 2 from touching the bottom, and improving the maximum deflection angle of the entire micromirror.

Embodiment 3

[0039] Such as Figure 4 As shown, the connection part 4 and the rotating shaft 3 of this embodiment are the same as those of the first embodiment. On the frame 1 , the deflection part 1 - 2 is isolated from other parts by two U-shaped deflection isolation grooves 11 , and the deflection part 1 - 2 is connected to the rotating shaft 3 and is processed with the second electrode 9 . A feedback isolation groove 12 is processed outside the deflection isolation groove 11, and the feedback part 1-3 is formed between the feedback isolation groove 12 and the deflection isolation groove 11. The third electrode 10 is processed on the feedback part 1-3, and the end of the feedback isolation groove 12 The comb tooth group on the side of the connecting part 4 is divided into upper and lower parts. Among them, the fixed teeth located on the feedback part 1-3 away from the mirror 2 and the corresponding movable teeth form the feedback comb set 7, and the fixed teeth inside the driving part ...

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Abstract

The invention discloses an electrostatic scanning micromirror which comprises an upper micromirror body and a lower bonding bottom plate. The micromirror body comprises a frame and a mirror surface, and a back surface of the frame is fixed on the bonding bottom plate; an upper end and a lower end of the mirror surface are connected with connecting parts respectively and connected with the frame through a rotating shaft; and movable teeth are machined on outer sides of the connecting parts, and static teeth are machined at positions, opposite to the movable teeth, of an inner side of the frame.According to the electrostatic scanning micromirror, the special connecting part is arranged between the rotating shaft and the mirror surface, and comb teeth are arranged on the outer sides of the connecting parts so that an arrangement area of the comb teeth can be increased, a driving force of the micromirror is enhanced, and a maximum deflection angle of the micromirror is increased. Meanwhile, isolation grooves of different structures are arranged in the frame, the frame is divided into different functional areas, all the comb tooth sets are divided into a driving comb tooth set and a feedback comb tooth set, a mirror surface deflection angle can be monitored in real time while mirror surface deflection is driven, and mirror surface deflection angle control accuracy is improved.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems, in particular to an electrostatic scanning micromirror manufactured based on MEMS processing technology. Background technique [0002] MEMS refers to Micro-Electro-Mechanical System (Micro-Electro-Mechanical System), which is a revolutionary new technology developed on the basis of microelectronics technology. Electromechanical devices. MEMS devices are widely used in high-tech industries and are a key technology related to technological development, economic prosperity and national defense security. Among them, the scanning micromirror is a light reflective device developed by using MEMS technology. By connecting the twisted structure of the mirror surface, under the action of the micro driving force, the mirror surface is deflected to realize the reflection of the beam in one or two dimensions. Scanning has the advantages of low cost, high reliability, miniaturization, and easy m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
CPCG02B26/0841
Inventor 程进孙其梁徐乃涛李宋泽
Owner 无锡微视传感科技有限公司