Unlock instant, AI-driven research and patent intelligence for your innovation.

A pollutant isolation device and vacuum degree monitoring equipment

A technology for isolating devices and pollutants, used in vacuum gauges, measuring devices, measuring fluid pressure, etc., can solve the problems of vacuum gauge failure, affecting test values, etc., and achieve the effect of buffering flow rate and pressure.

Active Publication Date: 2022-02-01
DYNAX SEMICON
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The general-purpose vacuum gauge and other devices are directly connected to the chamber, or a valve is added between the reaction chamber and the vacuum gauge (open the valve only when the vacuum gauge needs to be used for measurement). During the reaction process of the chamber, the vacuum gauge monitors The air pressure value of the cavity. At this time, the vacuum gauge is connected to the cavity. Most of the reaction products are pumped out and discharged, but some impurities still enter the vacuum gauge port through the connecting channel. After a long period of accumulation of impurities, it directly affects the vacuum. Gauge test value, vacuum gauge failure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A pollutant isolation device and vacuum degree monitoring equipment
  • A pollutant isolation device and vacuum degree monitoring equipment
  • A pollutant isolation device and vacuum degree monitoring equipment

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0035] see in conjunction Figure 1 to Figure 3, this embodiment provides a pollutant isolation device 100, the entire device is installed on the pipeline between the vacuum gauge and other monitoring instruments and the reaction chamber, of course, the pollutant isolation device 100 provided in this embodiment can also be installed in other For the pipelines or interfaces that need to isolate pollutants, this embodiment only uses the pipelines between monitoring instruments such as vacuum gauges and the reaction chamber as an example for illustration.

[0036] The pollutant isolation device 100 includes a vacuum shell 110, a first isolation plate 130, a second isolation plate 150, and a connector 170. The first isolation plate 130 and the second isolation plate 150 are spaced in the vacuum shell 110, and the first isolation plate There is an isolation cavity between 130 and the second isolation plate 150, and the connector 170 is arranged in the isolation cavity and connected...

no. 2 example

[0062] This embodiment provides a vacuum degree monitoring device, including a vacuum gauge and a pollutant isolation device 100, wherein the basic structure, principle and technical effect of the pollutant isolation device 100 are the same as those of the first embodiment. For a brief description, this For the parts not mentioned in the embodiment part, reference may be made to the corresponding content in the first embodiment.

[0063] The pollutant isolation device 100 includes a vacuum shell 110, a first isolation plate 130, a second isolation plate 150, and a connector 170. The first isolation plate 130 and the second isolation plate 150 are spaced in the vacuum shell 110, and the first isolation plate There is an isolation cavity between 130 and the second isolation plate 150, and the connector 170 is arranged in the isolation cavity and connected with the first isolation plate 130 and the second isolation plate 150 respectively, and the first isolation plate 130 is provi...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a pollutant isolation device and vacuum degree monitoring equipment, which relate to the technical field of vacuum equipment. The two isolation plates are arranged at intervals in the vacuum tube shell, and there is an isolation cavity between the first isolation plate and the second isolation plate, the connectors are arranged in the isolation cavity and connected with the first isolation plate and the second isolation plate respectively, A first flow hole is opened on the plate, a second flow hole is opened on the second isolation plate, and the diameter of the first flow hole is greater than or equal to that of the second flow hole. Compared with the prior art, the present invention provides a pollutant isolation device, which can effectively prevent the impact of products on vacuum gauges and other instruments, avoid equipment by-products from polluting vacuum gauges and other instruments, and ensure the accuracy of test values ​​of vacuum gauges and other instruments. Accuracy, prolong the service life of instruments such as vacuum gauges.

Description

technical field [0001] The invention relates to the technical field of vacuum equipment, in particular to a pollutant isolation device and vacuum degree monitoring equipment. Background technique [0002] Processing equipment with high vacuum chamber equipment is widely used in various fields. During the process, instruments such as vacuum gauges are often used to monitor the pressure value of the reaction chamber. [0003] The general-purpose vacuum gauge and other devices are directly connected to the chamber, or a valve is added between the reaction chamber and the vacuum gauge (open the valve only when the vacuum gauge needs to be used for measurement). During the reaction process of the chamber, the vacuum gauge monitors The air pressure value of the cavity. At this time, the vacuum gauge is connected to the cavity. Most of the reaction products are pumped out and discharged, but some impurities still enter the vacuum gauge port through the connecting channel. After a l...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B01J3/00B01J3/04G01L21/00
CPCB01J3/04B01J3/006B01J3/002G01L21/00
Inventor 胡启琼
Owner DYNAX SEMICON