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Crack passivation in the matrix

A technology of cracks and passivation layers, applied in liquid chemical plating, laboratory containers, chemical instruments and methods, etc., can solve the problems of short-term, complete failure, and partial failure of sensors

Active Publication Date: 2021-02-23
ILLUMINA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This can lead to transient, partial, or complete failure of the sensors in the flow cell assembly

Method used

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  • Crack passivation in the matrix
  • Crack passivation in the matrix
  • Crack passivation in the matrix

Examples

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Embodiment Construction

[0021] Aspects of the application and some of its features, advantages and details are explained more fully hereinafter with reference to non-limiting examples shown in the accompanying drawings. Descriptions of well-known materials, fabrication tools, processing techniques, etc. are omitted so as not to unnecessarily obscure the relevant details. It should be understood, however, that the detailed description and specific examples, while indicating aspects of the application, are given by way of illustration only and not limitation. Various alternatives, modifications, additions and / or arrangements within the spirit and / or scope of the basic inventive concept will be apparent to those skilled in the art from this application.

[0022] As used herein throughout the specification and claims, approximating language may be used to modify any quantitative representation that may allow variation without resulting in a change in the basic function to which it is related. Accordingl...

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Abstract

In one example provided is a sensor having at least one fissure at least partially filled by at least one polymeric formation extending vertically within the passivation layer. The polymeric former protects the underlying metal-containing layer from corrosive solutions. In another example provided is a method of forming the polymeric formation in a fracture of a sensor.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Patent Application No. 62 / 609,856, filed December 22, 2017, the entire contents of which are incorporated herein by reference. Background technique [0003] Substrates in flow cell devices are often exposed to corrosive solutions. The matrix acts as a sensor for flow cell sensors, such as biosensors for DNA and RNA detection or sequencing. The solutions used for these types of sensors are corrosive in nature in order to perform tests such as nucleic acid sequencing. Robust sensors rely on the microscopic integrity of the entire chip, since the corrosive solution can penetrate any cracks or fissures and contact the metal-containing layers of the chip that are relevant to sensor operation. This can lead to transient, partial, or complete failure of sensors in the flow cell device. [0004] Accordingly, there is a need for improved passivation of surfaces of sensors e...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C18/16C23C6/00
CPCC25D13/22B01L3/502B01L2300/0645B01L2300/0663B01L2300/0893B01L2300/0896B01L2300/12C25D9/02G01N27/4145
Inventor H·布莱克
Owner ILLUMINA INC