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Auxiliary equipment for silicon wafer manual detection

A kind of auxiliary equipment and manual detection technology, which can be used in measurement devices, optical testing of flaws/defects, and material analysis by optical means. Effect

Inactive Publication Date: 2020-05-15
QINGTIAN LINXIN SEMICON TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Silicon wafer is a kind of semiconductor raw material, which can be used to make chips and the carrier of solar cells. The quality of silicon wafers directly determines the conversion efficiency of solar cells. Therefore, it is necessary to carry out defect detection on silicon wafers, including a manual The process of observing the surface of the silicon wafer. At present, when the silicon wafer is inspected, it is necessary to manually place the silicon wafer flat on the workbench, first observe whether there is any defect on the front of the silicon wafer, and then turn the silicon wafer so that the back is facing upwards. Observe whether there is any defect on the back of the silicon wafer. The problem with the above method is that the silicon wafer needs to be turned manually, resulting in low detection efficiency, and the silicon wafer is directly laid on the workbench, which may easily cause scratches on the contact surface of the silicon wafer and the workbench. marks, which affect the quality of silicon wafers, aiming at the problems mentioned above, so the present invention is proposed

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  • Auxiliary equipment for silicon wafer manual detection
  • Auxiliary equipment for silicon wafer manual detection
  • Auxiliary equipment for silicon wafer manual detection

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Embodiment Construction

[0016] Combine below Figure 1-4 The present invention is described in detail, wherein, for the convenience of description, the orientations mentioned below are defined as follows: figure 1 The up, down, left, right, front and back directions of the projection relationship itself are the same.

[0017] The auxiliary equipment for manual detection of silicon wafers described in conjunction with accompanying drawings 1-4 mainly includes a support plate 10, and a support frame 12 is fixed symmetrically on the front end of the support plate 10, and a support frame 12 is installed between the left and right support frames 12. Conveyor belt 11, described support frame 12 is equipped with power motor 13, and described power motor 13 is connected with described conveyer belt 11 power, and described conveyer belt 11 belt surface is fixedly provided with detection box 40, and described detection box 40 There is a placement chamber 41 that penetrates back and forth, and a transparent gl...

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Abstract

The invention discloses auxiliary equipment for silicon wafer manual detection. The auxiliary equipment comprises a supporting plate. Supporting frames are fixedly arranged on the front end face of the supporting plate in bilateral symmetry. A conveying belt is mounted between the left supporting frame and the right supporting frame. A power motor is mounted on one supporting frame and is in powerconnection with the conveying belt. Detection boxes are fixedly arranged on the surface of the conveying belt. A containing cavity penetrating the front portion and the rear portion is arranged in each detection box. Transparent glass is mounted in each containing cavity. When the auxiliary equipment is used for detecting silicon wafers, the silicon wafers can be automatically placed at the detection position, the silicon wafers are automatically turned over after one faces of the silicon wafers are detected by workers, after the front faces and the back faces of the silicon wafers are detected, the silicon wafers can be classified to be stored according to quality grades, and therefore the silicon wafers does not need to be revered manually in the whole detection process, and work efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of silicon wafer detection, in particular to an auxiliary device for manual detection of silicon wafers. Background technique [0002] Silicon wafer is a kind of semiconductor raw material, which can be used to make chips and the carrier of solar cells. The quality of silicon wafers directly determines the conversion efficiency of solar cells. Therefore, it is necessary to carry out defect detection on silicon wafers, including a manual The process of observing the surface of the silicon wafer. At present, when the silicon wafer is inspected, it is necessary to manually place the silicon wafer flat on the workbench, first observe whether there is any defect on the front of the silicon wafer, and then turn the silicon wafer so that the back is facing upwards. Observe whether there is any defect on the back of the silicon wafer. The problem with the above method is that the silicon wafer needs to be turned man...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B07C5/02B07C5/36B07C5/38G01N21/88G01N21/13
CPCB07C5/02B07C5/362B07C5/38G01N21/13G01N21/8803
Inventor 不公告发明人
Owner QINGTIAN LINXIN SEMICON TECH CO LTD