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A high strength, high toughness, high thermal conductivity silicon nitride ceramic material and preparation method thereof

A technology of silicon nitride ceramics and raw materials, applied in the field of high toughness, high thermal conductivity silicon nitride ceramic materials and its preparation, and high strength, can solve the problems of restricting large-scale application, low thermal conductivity of ceramics, and poor mechanical properties , to achieve the effect of improving thermal conductivity, improving thermal conductivity, bending strength and fracture toughness

Active Publication Date: 2022-07-08
江西中科上宇科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

where Al 2 o 3 Ceramics have the lowest thermal conductivity and poor mechanical properties, which can only meet low-end applications; AlN has good thermal conductivity, but its poor mechanical properties and low reliability limit its large-scale application

Method used

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  • A high strength, high toughness, high thermal conductivity silicon nitride ceramic material and preparation method thereof
  • A high strength, high toughness, high thermal conductivity silicon nitride ceramic material and preparation method thereof
  • A high strength, high toughness, high thermal conductivity silicon nitride ceramic material and preparation method thereof

Examples

Experimental program
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Effect test

preparation example Construction

[0034] As an example of the preparation of mixed powder, including: 3 N 4 The powder is mixed with the sintering aid, and the powder is uniformly mixed after ball milling, drying and sieving. Ball milling can use vacuum ball milling tank wet ball milling, and the atmosphere in the ball mill tank can be vacuum or filled with Ar, N 2 , the wet ball milling uses alcohol as the solvent, the material: solvent ratio can be (1:1) ~ (3:1), the material: ball ratio can be (1:1) ~ (5:1), and the number of ball milling revolutions is 200 ~500rpm, ball milling time is 4 ~ 20h. Drying can be carried out by rotary evaporation drying or vacuum drying. The whole drying process can be carried out in vacuum, Ar, N 2 in a protective atmosphere. Wherein, the drying temperature may be 50°C to 100°C, and the drying time may be 8 to 24 hours. The mesh number of the sieve can be 60-300 meshes.

[0035] The mixed powder is pressed into shape to obtain a green body. Compression molding may inclu...

Embodiment 1

[0046] With 0.5wt% Y and 1.5wt% MgO as sintering aids, and 98wt% α-Si 3 N 4 The powder is mixed by ball milling, dried and sieved to obtain a uniformly mixed powder; then dry-pressed under 20MPa pressure, and then cold isostatic pressing under 250MPa pressure; the obtained body is placed in a BN crucible , pre-sintered at 800 °C for 4 h in an Ar atmosphere; then the pre-sintered body was pressure-sintered at 1900 °C, where the heating rate was 10 °C / min, N 2 The pressure is 1MPa, and the holding time is 4h; after sintering, it is cooled to 1200°C at a cooling rate of 10°C / min, and then cooled to room temperature with the furnace.

[0047] The thermal conductivity of the silicon nitride ceramic material prepared in Example 1 is 95.2W / (m·K), the three-point bending strength is 713±21MPa, and the fracture toughness is 9.91±0.19MPa·m 1 / 2 .

Embodiment 2

[0049] With 2.5wt% Y and 1.5wt% MgO as sintering aids, and 96wt% α-Si 3 N 4 The powders are mixed by ball milling, sieved after drying to obtain uniformly mixed powders; then dry-pressed under 30MPa pressure, and then cold isostatic pressing under 300MPa pressure; the obtained body is placed in a BN crucible , pre-sintered at 1400 °C for 6 h in an Ar atmosphere; then the pre-sintered green body was pressure-sintered at 1850 °C, where the heating rate was 5 °C / min, N 2 The pressure is 1MPa, and the holding time is 4h; after sintering, it is cooled to 1000°C at a cooling rate of 10°C / min, and then cooled to room temperature with the furnace.

[0050] The thermal conductivity of the silicon nitride ceramic material prepared in Example 2 is 87.6W / (m·K), the three-point bending strength is 1018±29MPa, and the fracture toughness is 8.51±0.21MPa·m 1 / 2 .

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Abstract

The invention relates to a silicon nitride ceramic material with high strength, high toughness and high thermal conductivity and a preparation method thereof. The raw material composition of the silicon nitride ceramic material includes α-Si 3 N 4 and a sintering aid; the sintering aid is a rare earth metal element and an alkaline earth metal oxide, with a total content of 2-12 wt%; the rare earth metal element is Y; the alkaline earth metal oxide is preferably among MgO, CaO and BaO at least one of.

Description

technical field [0001] The invention relates to a high-strength, high-toughness, high-thermal-conductivity silicon nitride ceramic material and a preparation method thereof, in particular to a high-strength, high-toughness, high-thermal-conductivity silicon nitride ceramic material prepared by gas pressure sintering using metal Y powder and MgO as sintering aids rate Si 3 N 4 The method for ceramic materials belongs to the field of inorganic non-metallic materials. Background technique [0002] In recent years, power semiconductor devices that can efficiently control and convert electric power have been widely used in industrial robots, hybrid vehicles, high-speed railways, and aerospace. In addition, researchers expect that wide-bandgap semiconductor materials such as silicon carbide and gallium nitride will gradually replace silicon chips, and power devices will develop in the direction of high voltage, high current, and high power density. Therefore, circuit substrates...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/584C04B35/64
CPCC04B35/584C04B35/64C04B2235/6562C04B2235/6567C04B2235/658C04B2235/9607C04B2235/96
Inventor 曾宇平王为得左开慧夏咏锋姚冬旭尹金伟梁汉琴
Owner 江西中科上宇科技有限公司