A kind of grating sensor and using method thereof
A technology of grating sensor and reflective grating, which is applied in the field of grating sensor, can solve the problem that the accuracy of grating sensor is difficult to improve, and achieve the effect of improving the accuracy of displacement measurement
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Embodiment 1
[0053] The present invention is realized through the following technical solutions, as figure 1 As shown, a grating sensor includes a reading head, a right-angle reflective grating 5, and the right-angle reflective grating 5 includes N groups of first reflective structures, and each group of first reflective structures includes mutually perpendicular plane reflective surfaces and reflective gratings, The reading head includes a laser source 1, a right-angle mirror group 2, an indicating grating 3, a photodetector 4, and a processor, wherein:
[0054] The flat reflective surface is a reflective surface that cannot transmit light, and the reflective grating has a grating with a fixed pitch.
[0055] The laser source 1 is used for emitting laser beams to the planar reflective surfaces in the first group of first reflective structures.
[0056] The right-angle mirror group 2 includes M groups of second reflection structures, M is less than or equal to N-1, each group of second re...
Embodiment 2
[0082] As another possible implementation, such as image 3 As shown, a grating sensor includes a reading head and a right-angle mirror group 2, and the right-angle mirror group 2 includes N groups of second reflective structures, and each group of the second reflective structures includes two mutually perpendicular reflective surfaces, The reading head includes a laser source 1, a right-angle reflective grating 5, an indicating grating 3, a photodetector 4, and a processor, wherein:
[0083] The laser source 1 is used for emitting laser beams to the reflective surfaces in the first group of second reflective structures.
[0084]The right-angle reflective grating 5 includes M groups of first reflective structures, wherein M is less than or equal to N-1, and each group of first reflective structures includes two mutually perpendicular reflective surfaces, wherein the last reflective surface of the last group of first reflective structures A reflective grating is arranged on th...
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