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A kind of grating sensor and using method thereof

A technology of grating sensor and reflective grating, which is applied in the field of grating sensor, can solve the problem that the accuracy of grating sensor is difficult to improve, and achieve the effect of improving the accuracy of displacement measurement

Active Publication Date: 2021-11-05
BEIFANG UNIV OF NATITIES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The grating sensor is a kind of metrological grating made according to the principle of Moiré fringes. It is mostly used for displacement measurement and physical quantities related to displacement, such as velocity, acceleration, vibration, mass, surface profile, etc. The existing grating sensor has difficulty in accuracy. improve

Method used

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  • A kind of grating sensor and using method thereof
  • A kind of grating sensor and using method thereof
  • A kind of grating sensor and using method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0053] The present invention is realized through the following technical solutions, as figure 1 As shown, a grating sensor includes a reading head, a right-angle reflective grating 5, and the right-angle reflective grating 5 includes N groups of first reflective structures, and each group of first reflective structures includes mutually perpendicular plane reflective surfaces and reflective gratings, The reading head includes a laser source 1, a right-angle mirror group 2, an indicating grating 3, a photodetector 4, and a processor, wherein:

[0054] The flat reflective surface is a reflective surface that cannot transmit light, and the reflective grating has a grating with a fixed pitch.

[0055] The laser source 1 is used for emitting laser beams to the planar reflective surfaces in the first group of first reflective structures.

[0056] The right-angle mirror group 2 includes M groups of second reflection structures, M is less than or equal to N-1, each group of second re...

Embodiment 2

[0082] As another possible implementation, such as image 3 As shown, a grating sensor includes a reading head and a right-angle mirror group 2, and the right-angle mirror group 2 includes N groups of second reflective structures, and each group of the second reflective structures includes two mutually perpendicular reflective surfaces, The reading head includes a laser source 1, a right-angle reflective grating 5, an indicating grating 3, a photodetector 4, and a processor, wherein:

[0083] The laser source 1 is used for emitting laser beams to the reflective surfaces in the first group of second reflective structures.

[0084]The right-angle reflective grating 5 includes M groups of first reflective structures, wherein M is less than or equal to N-1, and each group of first reflective structures includes two mutually perpendicular reflective surfaces, wherein the last reflective surface of the last group of first reflective structures A reflective grating is arranged on th...

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Abstract

The invention relates to a grating sensor and a method for using the grating sensor, which includes a reading head and a right-angle reflective grating, the right-angle reflective grating includes N groups of first reflective structures, and each group of first reflective structures includes mutually perpendicular plane reflective surfaces and reflective The grating, the reading head includes a laser source, a right-angle mirror group, an indicating grating, a photodetector, and a processor. In the present invention, the laser beam is reflected multiple times between the right-angle reflection grating and the right-angle reflection mirror. The magnification effect of moiré fringes formed behind the indicator grating further improves the displacement measurement accuracy of the grating sensor of the present invention.

Description

technical field [0001] The invention relates to the technical field of grating sensors, in particular to a grating sensor and a method for using the grating sensor. Background technique [0002] The grating sensor is a kind of metrological grating made according to the principle of Moiré fringes. It is mostly used for displacement measurement and physical quantities related to displacement, such as velocity, acceleration, vibration, mass, surface profile, etc. The existing grating sensor has difficulty in accuracy. improve. Contents of the invention [0003] The purpose of the present invention is to improve the deficiencies existing in the prior art, provide a grating sensor and its use method, and improve the grating measurement accuracy. [0004] In order to achieve the purpose of the above invention, the embodiments of the present invention provide the following technical solutions: [0005] A grating sensor, including a reading head and a right-angle reflective grat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白
Owner BEIFANG UNIV OF NATITIES