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Phase measurement method, system, device and storage medium of a speckle interferogram

A speckle interferometry and phase measurement technology, applied in the field of measurement, can solve the problems of large deviation of measurement results, poor suppression of phase noise, and serious influence of phase noise, so as to reduce the impact, reduce phase noise, and avoid measurement effect of error

Active Publication Date: 2021-06-01
GUANGZHOU UNIVERSITY
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Problems solved by technology

Some existing technologies have solved the problem of additive noise better, but the phase noise is still not well suppressed
[0005] In summary, the main problems of the existing technology are: the actual use environment deviates from the condition of "known phase step size", which makes the measurement results deviate from the actual values; the phase noise has a serious impact on the measurement results

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  • Phase measurement method, system, device and storage medium of a speckle interferogram
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  • Phase measurement method, system, device and storage medium of a speckle interferogram

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Embodiment Construction

[0034] When applying phase-shifting interferometry, M speckle interferograms [I 1 ,I 2 ,...,I M ], in this embodiment, these speckle interferograms are two-dimensional images, which can be represented by pixel coordinates (x, y) on two dimensions, and these speckle interferograms are denoted as I m (x, y); In this embodiment, a set of arbitrarily given phase step size [δ 1 ,δ 2 ,...,δ M ], denote these speckle interferograms as δ m , at this time the subscript parameter m can take values ​​of m=1, 2, 3, . . . , M respectively.

[0035] Without considering the noise, the speckle interferogram can be expressed as the following formula (1):

[0036] I m (x,y)=I 0 (x,y)[1+K(x,y)cos(φ(x,y)+δ m )]; (1)

[0037] In formula (1), I 0 (x,y) is the speckle interferogram I m (x,y) is the mean intensity, while K(x,y) is the speckle interferogram I m The contrast of the stripes in (x,y). What needs to be obtained is φ(x, y), which means the phase information of the speckle int...

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Abstract

The invention discloses a method, system, device and storage medium for phase measurement of speckle interferograms. The method includes acquiring a set of speckle interferograms and a set of phase steps, and substituting the speckle interferograms and phase steps into In the formula, steps such as the phase obtained by measuring the speckle interferogram are determined. When implementing the phase measurement method of the speckle interferogram, the phase step size used can be given arbitrarily, and no longer depends on the precondition of "knowing the real phase step size", thus avoiding the The measurement error caused by the inability to use the real phase step size; in the case of any step size, the phase noise can be better reduced, so that more accurate measurement results can be obtained. The invention is widely used in the technical field of measurement.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a phase measurement method, system, device and storage medium of a speckle interferogram. Background technique [0002] When measuring intensity quantities such as stress by phase-shift interferometry (PSI), the speckle interferogram obtained by shooting the measured object can be obtained, and then the corresponding parameters can be determined according to the speckle interferogram as the final measurement result. [0003] In the prior art, in the process of determining the final measurement result according to the speckle interferogram, a given phase step is relied on, which actually implies a precondition that the phase step is known. However, in the practical application environment of phase-shift interferometry, the effective reference phase is determined not only by the phase shifter, but also by any other effects that change the relative optical path difference, so t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
CPCG01B9/02062G01B9/02094
Inventor 蔡长青
Owner GUANGZHOU UNIVERSITY
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