Multi-DOF Sample Holder with Spindle Drive Assembly

A technology of driving components and degrees of freedom, which is applied in the field of sample rods, and can solve problems such as complex relationships, inability to observe, and easy deformation of flexible claws

A technology of driving components and degrees of freedom, which is applied in the field of sample rods, and can solve problems such as complex relationships, inability to observe, and easy deformation of flexible claws

CN111257355BActive Publication Date: 2021-04-27ZHEJIANG UNIV
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  • Multi-DOF Sample Holder with Spindle Drive Assembly
  • Multi-DOF Sample Holder with Spindle Drive Assembly
  • Multi-DOF Sample Holder with Spindle Drive Assembly

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0166] figure 1 is a multi-degree-of-freedom sample holder. like figure 2 As shown, a nanopositioner is provided on the sample rod, and the nanopositioner includes a driving part 101, a joint ball 103 and a pressing part assembly, the joint ball 103 is fixed with the driving part 101, and the pressing part assembly includes at least two pressing parts 105 and an elastic connection Component 104 , the elastic connection component 104 connects adjacent pressure pieces, the pressure piece component embraces the joint ball 103 , and there is a pre-tightening force between the pressure piece and the joint ball 103 . For example, a piezoelectric ceramic tube is used as the drive element 101 .

[0167] Pressed piece

[0168] In some embodiments, such as figure 2 As shown, each pressing piece has a concave part 1051 and a connecting part 1052 respectively, and the elastic connection assembly 104 is arranged between the connecting parts 1052 of adjacent pressing pieces, and the c...

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PUM

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Abstract

The invention discloses a multi-degree-of-freedom sample rod with a rotating shaft driving assembly, which includes a casing and a rotating shaft, at least one set of rotating shaft driving assemblies is arranged between the casing and the rotating shaft, and each group of rotating shaft driving assemblies includes two symmetrically arranged drive units , the driving unit includes a substrate, electrodes and piezoelectric ceramic sheets. By setting multiple sets of rotating shaft drive components, the rotating shaft can rotate and move axially, so as to realize the driving of the sample rod with multiple degrees of freedom.

Description

technical field [0001] The invention relates to a sample rod used under an electron microscope and a transmission electron microscope. Background technique [0002] Transmission electron microscopy (TEM) can see fine structures smaller than 0.2 μm that cannot be seen clearly under ordinary optical microscopes. These structures are called submicrostructures or ultrastructures. In 1932, Ruska invented the transmission electron microscope with electron beam as the light source. Currently, the resolution of TEM can reach 0.2nm. [0003] In situ observation techniques have a long history in transmission electron microscopy research. By applying various physical effects on the sample and using a transmission electron microscope (TEM) to observe the changes in the microstructure and chemical state of the material, it is possible to intuitively study the performance of the material or device in the actual use process. For the performance of the material The research has important ...

Claims

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Application Information

Patent Timeline
27 Apr 2021
Publication
CN111257355B
IPC
G01N23/04; H01J37/20
CPC
G01N23/04; G01N2223/102; G01N2223/309; H01J37/20
Inventors
王宏涛; 张奕志