Vertical single-optical-element rotary Mueller matrix imaging measuring device and method

Abstract

The invention discloses a vertical single-optical-element rotary Mueller matrix imaging measuring device and method and belongs to the technical field of polarization optical measurement and micro imaging. The device comprises a light source, a reflector, a polarization modulation unit, a sample measurement unit, a polarization demodulation unit, an optical detector and a calculator which are sequentially arranged along a light path. The device is characterized in that the Stokes-Mueller calculus principle is utilized to establish the relationship between a to-be-measured sample and changing light intensity measured by the optical detector, a Mueller matrix imaging measuring device is adopted to measure a full Mueller matrix of the to-be-measured sample so that all optical anisotropy parameters of the to-be-measured sample are further obtained. The device is advantaged in that problems of complex operation, low measurement precision and the like in the processes of measurement, transformation solution and the like of a polynomial Fourier coefficient are solved, so the measurement speed and precision are improved, and non-destructive, quick and accurate measurement of the structuralmorphology and optical anisotropy parameters of the sample can be realized.

Description

technical field [0001] The invention relates to the technical fields of polarization optical measurement and microscopic imaging, in particular to a measuring device and a measuring method for a vertical single optical element rotating Mueller matrix imaging, that is, the measuring device is used to measure the full Mueller matrix elements and optical components of a sample. A method for measuring anisotropic parameters in a vertical single optical element rotation-type Mueller matrix imaging. Background technique [0002] In recent years, with the rapid development of semiconductor devices, nanomaterials, thin film materials, nanobiomedicine and other technical fields, various functional materials have changed from the original two-dimensional planar structure to a complex three-dimensional structure. As the structure changes, its inherent optical properties will also change. As the most important optical properties of anisotropic materials, optical parameters can directly...

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Problems solved by technology

[0004] The object of the present invention is to provide a kind of measuring device and method of vertical single optical element rotating Muller matrix imaging in view of the deficiencies in the prior art. On the basis of the rotating Muller matrix ellipsometer, it solves the complex operation and low measurement accuracy due to the fact that the finally detected transmitted light intensity contains part of the reflected light intensity component, the measurement of the polynomial Fourier coefficient and the transformation solution, etc. problem, the full Mueller matrix elements of the sample can be measured more quickly and efficiently

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