Semiconductor chip character surface defect pin defect detection light source
A defect detection, semiconductor technology, used in optical testing flaws/defects, measuring devices, material analysis by optical means, etc., can solve problems such as not being able to achieve results at the same time
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[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0037] The invention provides a semiconductor chip character surface defect pin defect detection light source, which uses a combination of a square light source and a ring light source to detect the semiconductor chip. The square light source can distinguish the copper leakage phenomenon of the product, and is used for detectin...
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