Micro electro mechanical system pump module

Abstract

The invention discloses a micro electro mechanical system pump module. The micro electro mechanical system pump module comprises a micro electro mechanical system chip; the micro electro mechanical chip comprises a chip body, a plurality of micro electro mechanical system pumps, a plurality of first connecting points, a plurality of second connecting points, at least one first control electrode and at least one second control electrode; the micro electro mechanical system chip comprises a chip body and is in a rectangular shape and is provided with two long edges and two short edges; the microelectro mechanical system pumps are arranged on the chip body, and each micro electro mechanical system pump is provided with a first electrode and a second electrode; the plurality of first connecting points are arranged on the chip body and are electrically connected with the first electrodes of the micro electro mechanical system pumps; the plurality of second connecting points are arranged onthe chip body and are electrically connected with the second electrodes of the micro electro mechanical system pumps; the at least one first control electrode is arranged on the chip body and is electrically connected with the first connecting points; and at least one second control electrode is arranged on the chip body and is electrically connected with the second connection points. The at least one first control electrode and the at least one second control electrode are arranged on two opposite sides of the chip body respectively.

Description

【Technical Field】 [0001] This case is about a MEMS pump module, especially a MEMS pump module that uses a novel layout method to reduce the chip area. 【Background technique】 [0002] With the rapid development of science and technology, the traditional fluid conveying device has been moving towards miniaturization of the device and maximum flow rate. The application is also becoming more and more diversified, from industrial applications, biomedical applications, medical care, electronic heat dissipation to recently popular wearable devices, it can be seen. [0003] In recent years, micro-electromechanical-related manufacturing processes have been integrated to achieve the chipization of fluid delivery devices, such as figure 1 As shown, the conventional MEMS pump module 9 includes a chip body 90 and a plurality of MEMS pumps 91. A plurality of microelectromechanical pumps 91 are integrally formed on the chip body 90, and each microelectromechanical pump 91 has a plurality of cont...

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Problems solved by technology

[0004] However, the control electrode 91a contained in the chip-based fluid delivery device often occupies a large area, so that the cost of the chip cannot be reduced.

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