Device and method for recovering and treating low-concentration sf6 gas in closed space
A technology of gas recovery and closed space, which is applied in the direction of chemical instruments and methods, separation methods, sulfur and halogen compounds, etc., can solve problems such as time-consuming, pollute the environment, affect work efficiency, etc., and achieve the reduction of SF6 content and rapid processing The effect of treatment
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[0095] As a specific implementation of the embodiment of the present invention, the condensation-membrane separation-liquefaction recovery treatment includes the following steps:
[0096] (1) through the direction selection unit 302, the gas flows to the condensation separation unit;
[0097] (2) The gas is condensed and separated through the condensation separation unit, and the separated gas contains a higher concentration of SF 6 The gas enters the gas recovery part 6;
[0098] (3) Contains a lower concentration of SF after condensation and separation 6 The gas flows into the gas circulation membrane separation part 4 for membrane separation treatment, and the separated SF 6 The gas with higher content enters the gas recovery unit 6, and the separated tail gas is discharged after being processed by the tail gas treatment unit 5;
[0099] (4) The gas recovery unit 6 carries out liquefaction, separation and recovery of the gas in it to obtain liquid SF 6 .
[0100] In th...
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