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MEMS sensor detection device and MEMS sensor system

A detection device and sensor technology, which is applied to instruments, multi-terminal pair networks, and frequency-selective two-terminal pair networks, etc., can solve the problems of large low-frequency noises that cannot meet the requirements of high-precision and high-sensitivity applications, and achieve improved low-frequency noise performance and improved The effect of system accuracy and widening system bandwidth

Active Publication Date: 2020-08-21
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] What the present invention aims to solve is the problem that the existing MEMS sensor system has large low-frequency noise and cannot meet the application requirements of high precision and high sensitivity.

Method used

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  • MEMS sensor detection device and MEMS sensor system
  • MEMS sensor detection device and MEMS sensor system

Examples

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Embodiment Construction

[0048] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the examples and accompanying drawings. As a limitation of the present invention.

[0049] Embodiments of the present invention provide a MEMS sensor system and a MEMS sensor detection device, figure 2 is a schematic diagram of the circuit structure of the MEMS sensor system. The MEMS sensor system includes a MEMS sensor 10 and the MEMS sensor detection device, and the MEMS sensor detection device includes a preamplifier 11 , a loop filter 12 , a feedback circuit 13 and an HL filter 14 .

[0050] Specifically, the MEMS sensor 10 is used to convert measured physical quantities such as pressure, acceleration and flow into weak electrical signal outputs. For example, the MEMS sensor 10 may be a capacitive MEMS acceleration sensor, and the capacitive MEMS acceleration sensor is used to conve...

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Abstract

The invention discloses an MEMS sensor detection device and an MEMS sensor system. The MEMS sensor detection device comprises a pre-amplifier, a loop filter and a feedback circuit, and further comprises an HL type filter arranged behind the pre-amplifier, and the pre-amplifier, the loop filter and the HL type filter are connected in series. The HL-type filter has a high-pass filtering function ona low-frequency-band signal, and the HL-type filter has a low-pass filtering function on a high-frequency-band signal. According to the MEMS sensor detection device and the MEMS sensor system providedby the invention, the low-frequency noise performance of the MEMS sensor can be effectively improved, the system precision is improved, and the bandwidth of the MEMS sensor system is broadened.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a MEMS sensor detection device and a MEMS sensor system. Background technique [0002] With the further development of artificial intelligence, automatic driving, inertial navigation and the Internet of Things, signal detection is particularly important, and sensor technology closely related to signal detection has also developed rapidly. In particular, the development of the Internet of Things has greatly increased the demand for sensor products, and the focus has gradually shifted to the field of Micro-Electro-Mechanical Systems (MEMS, Micro-Electro-Mechanical Systems) sensors with high technical content. MEMS is a micro-device or system that integrates micro-sensors, micro-actuators, micro-mechanical mechanisms, signal processing and control circuits, high-performance electronic integrated devices, interfaces, communications and power supplies using tra...

Claims

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Application Information

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IPC IPC(8): G01D18/00H03H11/04
CPCG01D18/00H03H11/04
Inventor 李宗伟周永建张潇筱刘婧孟海龙杨长春韩可都冯方方
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI