Online replacement type uninterrupted output power supply

Abstract

The invention discloses an on-line replacement type uninterrupted output power supply which comprises a mainboard and a plurality of power supply modules inserted into the mainboard. The sum of the output power of the plurality of power supply modules is used as the total output power of the uninterrupted output power supply, and the mainboard comprises an alarm system; a real-time feedback and diagnosis system which is used for monitoring the working parameter data of the plurality of power supply modules in real time and sending out an alarm prompt through the alarm system when any working parameter of the power supply modules reaches a preset alarm value; a module switching system which is used for controlling the power output state of the power modules according to the monitoring result of the real-time feedback and diagnosis system, and when any working parameter of the power supply module reaches a preset alarm value, controlling the power supply modules to stop power output, andmeanwhile, adjusting the output power of other power supply modules, so that the sum of the output power of other power supply modules is kept at the total output power. According to the invention, the online replacement power supply module and the uninterrupted power output are realized.

Description

technical field [0001] The invention relates to power supply equipment for non-stop production lines, in particular to an on-line replaceable uninterrupted output power supply. Background technique [0002] Power supply equipment is widely used in the field of semiconductor production. With the development of vacuum plasma technology, radio frequency, microwave and DC power supplies are indispensable components for generating plasma. In the semiconductor process of crystal growth, ion etching and dry deglue play a key role. Especially with the breakthrough of complex processes such as ALD and ALE, the ability to continuously supply power is required to be higher and higher during the crystal growth, etching or deglue process. The existing power supply design mainly has the following status quo. First, no matter whether MKS, AE, COMDEL, etc. produce power supply equipment including radio frequency, microwave or DC power supply, they do not have uninterrupted output capabilit...

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Problems solved by technology

[0003] Based on the above factors, the existing power supply equipment has the following defects: First, once a problem occurs in the power supply, the equipment must cut off the power supply, water supply or air supply, and then the entire power supply can be replaced. It does not have the ability to replace online. According to statistics, It takes an average of 2-4 hours to replace a power supply, and an average of 6-8 hours to restore the machine and process, which is not a small loss for a semiconductor production line with an investment of tens of billions.

Secondly, once any component in the power supply fails, the power supply will stop outputting immediately, which will cause the plasma in the semiconductor production process to be extinguished, crystal growth or plasma etching to stop, resulting in product scrapping and machine shutdown, seriously affecting production efficiency and loss

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